Ceramic channel plate for a fluid-based switch, and method for making same
First Claim
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1. A channel plate for a fluid-based switch, produced by:
- forming a plurality of channel plate layers in ceramic green sheet;
forming at least one channel plate feature in at least one of the channel plate layers; and
laminating the channel plate layers to form the channel plate.
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Abstract
Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) forming a plurality of channel plate layers in ceramic green sheet, 2) forming at least one channel plate feature in at least one of the channel plate layers, and 3) laminating the channel plate layers to form the channel plate. A method for making a switch with a ceramic channel plate is also disclosed.
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Citations
16 Claims
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1. A channel plate for a fluid-based switch, produced by:
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forming a plurality of channel plate layers in ceramic green sheet;
forming at least one channel plate feature in at least one of the channel plate layers; and
laminating the channel plate layers to form the channel plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for making a switch, comprising:
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forming a plurality of channel plate layers in ceramic green sheet;
forming at least one channel plate feature in at least one of the channel plate layers;
laminating the channel plate layers to form a channel plate; and
aligning the at least one feature formed in the channel plate with at least one feature on a substrate and sealing at least a switching fluid between the channel plate and the substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification