Devices having vertically-disposed nanofabric articles and methods of making the same

• US 6,924,538 B2
• Filed: 02/11/2004
• Issued: 08/02/2005
• Est. Priority Date: 07/25/2001
• Status: Expired due to Fees

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Segal, Brent M., Rueckes, Thomas, Jaiprakash, Venkatachalam C.
• Primary Examiner(s): Coleman, W. David
• Application Number:
  US10/776,572
• Publication Number:
  US 20040175856A1
• Time in Patent Office: 538 Days
• Field of Search: 257/415, 438/50
• US Class Current: 257/415
• CPC Class Codes: B81B 2203/0338 Channels
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 2202/22 Electronic properties
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: G11C 11/56 using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
• CPC Class Codes: G11C 13/0033 Disturbance prevention or evaluation; Refreshing of disturbed memory data
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/77 Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 2221/1094 Conducting structures comprising nanotubes or nanowires
• CPC Class Codes: H10K 85/221 : Carbon nanotubes
• CPC Class Codes: Y10S 977/943 : Information storage or retrieval using nanostructure

Abstract

Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

Claims

1. An electro-mechanical device, comprising:

a structure having a major horizontal surface and a channel formed therein;

a conductive trace in the channel; and

a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel, and electro-mechanically deflectable in a horizontal direction toward or away from the conductive trace.

2. The electro-mechanical device of claim 1, wherein the nanotube article has a vertically suspended extent, and wherein the vertically suspended extent of the nanotube article is defined by a thin film process.

3. The electro-mechanical device of claim 2, wherein the vertically suspended extent of the nanotube article is about 50 nanometers or less.

4. The electro-mechanical device of claim 1, wherein the conductive trace is disposed in the vertical wall of the channel.

5. The electro-mechanical device of claim 1, wherein the nanotube article is clamped at two ends, one end proximal to a base of the channel and the other end proximal to an opening of the channel.

6. The electro-mechanical device of claim 1, wherein the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article.

7. The electro-mechanical device of claim 1 wherein the nanotube article is formed from a porous nanofabric.

8. The electro-mechanical device of claim 1 wherein the nanotube article is electromechanically deflectable into contact with the conductive trace and wherein the contact is a non-volatile state.

9. The electro-mechanical device of claim 1 wherein the nanotube article is electromechanically deflectable into contact with the conductive trace and wherein the contact is a volatile state.

10. The electro-mechanical device of claim 1 further comprising a second conductive trace in the channel in spaced relation to the nanotube article and that can cooperate with the conductive trace in the electromechanical deflection of the nanotube article.

11. The electro-mechanical device of claim 10 wherein the relationship between the nanotube article and at least one of the conductive trace and the second conductive trace is a volatile state relationship.

12. The electro-mechanical device of claim 10 wherein the nanotube article has two vertical extents, one for each vertical wall of the channel, and wherein the device includes a separate, third conductive trace, independently operable relative to the conductive trace and the second conductive trace.

13. The electro-mechanical device of claim 10 further including a second nanotube article, wherein the device includes a separate third conductive trace, independently operable relative to the conductive trace and the second conductive trace, and wherein the nanotube article is vertically suspended and in spaced relation to the conductive trace, and the second nanotube article is vertically suspended and in spaced relation to the third conductive trace, and wherein the second conductive trace is disposed between in spaced relation to the nanotube article and the second nanotube article.

14. The electro-mechanical device of claim 1 wherein the conductive trace is disposed in a vertical wall of the channel and wherein the device further comprises a second and third conductive trace in the channel, and a fourth conductive trace in another vertical wall of the channel, and wherein the device includes a second nanotube article, in a spaced relation to the fourth conductive trace, and wherein the first through fourth conductive traces are independently operable to deflect at least one of the nanotube articles toward at least one of the conductive traces.

15. The electro-mechanical device of claim 1 further comprising a second conductive trace in the channel, wherein the conductive trace is disposed in one vertical wall of the channel and the second conductive trace is disposed in another vertical wall of the channel, and wherein the device includes a second vertically suspended nanotube article, wherein the nanotube article is in space relation to the conductive trace and the second nanotube article is in spaced relation to the second conductive trace.

16. The electro-mechanical device of claim 1 wherein the conductive trace includes an insulative coating.