Vacuum seal protection in a dielectric break

• US 6,927,358 B2
• Filed: 01/31/2003
• Issued: 08/09/2005
• Est. Priority Date: 01/31/2003
• Status: Expired due to Fees

• Current Assignee: Advanced Energy Industries Incorporated
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Dillon, Steve, Gonzalez, Juan Jose, Shabalin, Andrew, Tomasel, Fernando Gustavo
• Primary Examiner(s): Paschall, Mark
• Application Number:
  US10/356,188
• Publication Number:
  US 20040149697A1
• Time in Patent Office: 921 Days
• Field of Search: 219/121.36, 219/121.52, 219/121.48, 219/121.4, 219/121.43, 315/111.51, 156/345.35, 156/345.38, 156/345.48, 156/345.49, 156/345.33, 118/723.R, 118/723.I, 118/723.IR, 118/723.AN, 204/298.37
• US Class Current: 219/121.43
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings

Abstract

In one aspect of the invention is a method to create a vacuum seal with extended lifetime to form a dielectric break in a vacuum chamber. The method includes the use of an elastic dielectric seal to form a high vacuum seal. It also includes the use of different means to protect the vacuum seal from direct exposure to the plasma and to reactive gases present inside the plasma chamber. Furthermore, it includes the use of elements to ensure a proper compression of the elastic seal, and to avoid its expansion or contraction when the pressures on both sides of the seal are different.

Claims

1. An apparatus comprising:

a gap through which corrosive elements enter an area that uses an elastic dielectric seal to seal the area;

a protective dielectric shield located at the gap to protect the elastic dielectric seal from corrosive elements that enter the area through the gap;

the elastic dielectric seal adjacent to the protective dielectric shield; and

a spacer adjacent to the elastic dielectric seal, the spacer to set a compression for the elastic seal.

2. An apparatus comprising:

a gap through which corrosive elements enter an area using an elastic dielectric seal to seal the area;

a protective dielectric shield located at the gap to protect the elastic dielectric seal from corrosive elements that enter the area through the gap;

a secondary dielectric shield adjacent to the protective dielectric shield;

the elastic seal adjacent to the secondary dielectric shield; and

a spacer adjacent to the elastic dielectric seal, the spacer to set a compression for the elastic seal.

3. A dielectric break in a plasma chamber in which plasma is present, comprising:

a gap formed between a first housing portion and a second housing portion of the plasma chamber;

a protective dielectric shield located between the first housing and the second housing at the gap;

a dielectric vacuum seal located between the first housing and second housing, and adjacent to the protective shield, the vacuum seal to create a closure between the first housing and the second housing when they are mated; and

a spacer located between the first housing and the second housing, and adjacent to the vacuum seal, the spacer to set a compression for the vacuum seal.

4. The dielectric break of claim 3, wherein the gap is formed by a protrusion of the first housing and a protrusion of the second housing when the first housing is mated to the second housing.

5. The dielectric break of claim 3, wherein the vacuum seal is additionally concentrically aligned with the protective shield, and the spacer is additionally concentrically aligned with the vacuum seal.

6. The dielectric break of claim 3, wherein the protective shield is used to protect the vacuum seal from direct contact with the plasma.

8. The dielectric break of claim 6, wherein the gap is formed by a protrusion of the first housing and a protrusion of the second housing when the first housing is mated to the second housing.

9. The dielectric break of claim 6, wherein the vacuum seal is additionally concentrically aligned with the protective shield, and the spacer is additionally concentrically aligned with the vacuum seal.

10. The dielectric break of claim 6, wherein the protective shield is used to protect the vacuum seal from direct contact with the plasma.

11. The dielectric break of claim 6, wherein the secondary shield is used to protect the vacuum seal from heat generated from the protective shield.

7. A dielectric break, comprising:

a gap formed between a first housing portion and a second housing portion of the plasma chamber;

a protective dielectric shield located between the first housing and the second housing at the gap;

a secondary dielectric shield located between the first housing and the second housing, and adjacent to the protective shield;

a dielectric vacuum seal located between the first housing and second housing, and adjacent to the secondary shield, the vacuum seal to create a closure between the first housing and the second housing when they are mated; and

a spacer located between the first housing and the second housing, and adjacent to the vacuum seal, the spacer to set a compression for the vacuum seal.

12. A plasma chamber, comprising:

a first housing portion;

a second housing portion mated to the first housing portion; and

at least one dielectric break between the first housing portion and the second housing portion, each dielectric break having;

a gap formed between a first housing portion and a second housing portion of the plasma chamber;

a protective shield located between the first housing and the second housing at the gap;

a vacuum seal located between the first housing and second housing, the vacuum seal to create a closure between the first housing and the second housing when they are mated; and

a spacer located between the first housing and the second housing, the spacer to set a compression for the vacuum seal.

13. The plasma chamber of claim 12, wherein the inlet gap is formed by a protrusion of the first housing and a protrusion of the second housing when the first housing is mated to the second housing.

14. The plasma chamber of claim 12, wherein the vacuum seal is adjacent to and concentrically aligned with the protective shield, and the spacer is adjacent to and concentrically aligned with the vacuum seal.

15. The plasma chamber of claim 12, additionally comprising a secondary shield that is adjacent to the protective shield on one side, and adjacent to the vacuum seal on the opposite side, and the secondary shield is used to protect the vacuum seal from heat generated from the protective shield.

16. The plasma chamber of claim 15, wherein the vacuum seal is adjacent to and concentrically aligned with the secondary shield, the spacer is adjacent to and concentrically aligned with the vacuum seal, and the secondary shield is additionally concentrically aligned with the protective shield.

17. The plasma chamber of claim 12, wherein the protective shield is used to protect the vacuum seal from direct contact with the plasma.