Following stage planar motor

• US 6,927,505 B2
• Filed: 12/19/2001
• Issued: 08/09/2005
• Est. Priority Date: 12/19/2001
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Binnard, Michael, Yuan, Bausan
• Primary Examiner(s): Schuberg, Darren
• Assistant Examiner(s): Mohandesi, Iraj A.
• Application Number:
  US10/021,053
• Publication Number:
  US 20030111912A1
• Time in Patent Office: 1,329 Days
• Field of Search: 310/12, 310/13, 310/15
• US Class Current: 310/12.01
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type

Abstract

In electric motor assemblies, separating the x and y coils may achieve significant advantages. An advantageous design includes pairs of interacting magnet array/coil arrays. Separated coil arrays are provided, with a coil array on an arm connected to a following stage, and another coil array on a stage base (the stage being one to which is attached magnet arrays). Positioning devices, moving magnet motor assemblies, moving coil motor assemblies, and methods of driving a stage are provided. By differential driving and creation of torques about the x and y axes, a stage may be driven in six independent degrees of freedom.

Claims

1. A stage assembly comprising:

a first motor that includes a first part and a second part, the first motor producing a first force;

a second motor that includes a first part and a second part, the second motor producing a second force;

a base to which the first part of the first motor is attached;

a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and

a second stage to which the first part of the second motor is attached, wherein

the base and the second stage are different respective bodies, and

the second stage includes at least one arm that extends in the y direction and includes the first part of the second motor for applying force in the y direction to the stage.

2. A stage assembly comprising:

a first motor that includes a first part and a second part, the first motor producing a first force;

a second motor that includes a first part and a second part, the second motor producing a second force;

a base to which the first part of the first motor is attached;

a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and

a second stage to which the first part of the second motor is attached, wherein

the base and the second stage are different respective bodies,

the second stage includes at least one arm that extends in the y direction and includes the first part of the second motor for applying force in the y direction to the stage,

the first part runs along the length of the at least one arm, and

the at least one arm is supported on the base by bearings.

3. A stage assembly comprising:

a first motor that includes a first part and a second part, the first motor producing a first force;

a second motor that includes a first part and a second part, the second motor producing a second force;

a base to which the first part of the first motor is attached;

a stage to which is attached the second part of the first motor and the second part of the second motor, the stage moving relative to the base by at least one of the first force and the second force; and

a second stage to which the first part of the second motor is attached, wherein

the base and the second stage are different respective bodies,

the second stage carries a portion of a levitation device which extends along the at least one arms in the y direction,

the stage carries another portion of the levitation device, and

the levitation device provides a levitation force to support the stage weight.

4. A stage assembly comprising:

a base member;

a stage that is supported by the base member, the stage being movable relative to the base member;

a ground that supports the base member;

a first driving device connected to the stage and the base member, the first driving device moving the stage along a first direction; and

a second driving device connected to the stage, the second driving device moving the stage along a second direction that is different from the first direction,

wherein a first reaction force that is generated by the first driving device acts on the base member and moves the base member relative to the ground along the first direction, and

wherein a second reaction force that is generated by the second driving device is not transmitted to the base member.

5. The stage assembly of claim 4, wherein the second reaction force is transmitted to a movable member that is isolated from the base member.

6. The stage assembly of claim 5, wherein the movable member is movable relative to the ground as a countermass.

7. The stage assembly of claim 4, further comprising a bearing device that is disposed between the base member and the ground.

8. The stage assembly of claim 7, further comprising an actuator that is connected to the base member, the actuator moving the base member along the first direction.

9. The stage assembly of claim 4, wherein the base member moves in a direction opposite to the direction of the movement of the stage along the first direction.

10. An exposure apparatus, comprising:

an illumination system that irradiates radiant energy; and

the stage assembly according to claim 4, the stage assembly disposing an object on a path at the radiant energy.

11. A device manufactured with the exposure apparatus of claim 10.

12. A wafer on which an image has been formed by the exposure apparatus of claim 10.

13. A stage assembly, comprising:

a base member;

a stage that is supported by the base member, the stage being movable relative to the base member;

a movable member that is isolated from the base member and movable relative to the stage;

a first driving device connected to the stage and the base member, the first driving device moving the stage along a first direction; and

a second driving device connected to the stage and the movable member, the second driving device moving the stage along a second direction that is different from the first direction,

wherein a first reaction force that is generated by the stage motion along the first direction is canceled by utilizing the motion of the base member and a second reaction force that is generated by the stage motion along the second direction is cancelled by utilizing the motion of the movable member.

14. The stage assembly of claim 13, wherein:

the first driving device includes a first part connected to the stage and a second part connected to the base member; and

the second driving device includes a first part connected to the stage and a second part connected to the movable member.

15. The stage assembly of claim 13, further comprising a bearing device that supports the base member movably.

16. The stage assembly of claim 15, further comprising an actuator that is connected to the base member, the actuator moving the base member along the first direction.