Solid slug longitudinal piezoelectric latching relay

• US 6,927,529 B2
• Filed: 05/02/2002
• Issued: 08/09/2005
• Est. Priority Date: 05/02/2002
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Fong, Arthur, Wong, Marvin Glenn
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US10/137,692
• Publication Number:
  US 20030207102A1
• Time in Patent Office: 1,195 Days
• Field of Search: 310/328, 310/363, 310/365, 200/181
• US Class Current: 310/328
• CPC Class Codes: H01H 1/08 wetted with mercury
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays
• CPC Class Codes: Y10T 428/256 Heavy metal or aluminum or compound thereof

Abstract

In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a solid slug and liquid metal is disclosed. The relay operates by means of a longitudinal displacement of a piezoelectric element in extension mode displacing a liquid metal drop and causing it to wet between at least one contact pad on the piezoelectric element or substrate and at least one other fixed pad to close the switch contact. This motion of the piezoelectric element is rapid and causes the imparted momentum of the solid slug and liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Claims

1. A latching piezoelectric relay comprising:

a chamber;

a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber;

a first and a second piezoelectric element disposed in opposition to each other within the chamber;

a moveable conductive liquid within the chamber, a first portion of the liquid is wetted to the first of said of contact pads and a portion of the liquid wetted to both the second and third of said contact pads; and

a solid slug imbedded with said portion of the liquid wetted to both the second and the third of said contact pads;

wherein said solid slug and said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads.

2. The relay of claim 1, further comprising a layer of cap material above said chamber and a layer of substrate material below said chamber, wherein said first, second and third contact pads have at least a portion within the chamber.

3. The relay of claim 2, wherein said moveable conductive liquid is a liquid metal.

4. The relay of claim 3, wherein said liquid metal is mercury.

5. The relay of claim 3 wherein said liquid metal is an alloy that contains gallium.

6. The relay of claim 4, wherein said first and second piezoelectric elements are longitudinally displaceable.

7. The relay of claim 4, wherein said first and second piezoelectric elements are bending mode elements.

8. The relay of claim 4, wherein said first and second piezoelectric elements are shear mode elements.

9. A piezoelectric relay for latching, said relay comprising;

a cap layer, a piezoelectric layer positioned below said cap layer, and

a substrate layer below said piezoelectric layer;

said piezoelectric layer comprising a chamber;

a first, second and third contact pad equally separated from each other, each of said contact pads having at least a portion within the chamber;

a first and a second piezoelectric element disposed in opposition to each other within the chamber;

a moveable conductive liquid within the chamber, a first portion of the liquid is wetted to the first of said of contact pads and a second portion of the liquid is wetted to both the second and third of said contact pads; and

a solid slug imbedded with said portion of the liquid wetted to both the second and the third of said contact pads;

wherein said solid slug and said portion of the liquid wetted to said second and third of said contact pads is moveable toward said portion wetted to the first of said contact pads.

10. The relay of claim 9, wherein said moveable conductive liquid is a liquid metal.

11. The relay of claim 10, wherein said liquid metal is mercury.

12. The relay of claim 10, wherein said liquid metal is an alloy that contains gallium.

13. The relay of claim 11, wherein said first and second piezoelectric elements are longitudinally displaceable.

14. The relay of claim 11, wherein said first and second piezoelectric elements are bending mode elements.

15. The relay of claim 11, wherein said first and second piezoelectric elements are shear made elements.