Acoustic resonator devices having multiple resonant frequencies and methods of making the same
First Claim
1. An acoustic resonator device, comprising:
- an acoustic resonant structure including first and second electrodes abutting opposite sides of a resonant volume free of any interposing electrodes, and first and second piezoelectric layers disposed for acoustic vibrations in the resonant volume and having different respective acoustical resonance characteristics and respective piezoelectric axes oriented in different directions;
wherein the acoustic resonant structure has resonant electric responses at first and second resonant frequencies respectively determined at least in part by the acoustical resonance characteristics of the first and second piezoelectric layers.
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Abstract
Acoustic resonator devices having multiple resonant frequencies and methods of making the same are described. In one aspect, an acoustic resonator device includes an acoustic resonant structure that includes first and second electrodes and first and second piezoelectric layers. The first and second electrodes abut opposite sides of a resonant volume free of any interposing electrodes. The first and second piezoelectric layers are disposed for acoustic vibrations in the resonant volume and have different respective acoustical resonance characteristics and respective piezoelectric axes oriented in different directions. The acoustic resonant structure has resonant electric responses at first and second resonant frequencies respectively determined at least in part by the acoustical resonance characteristics of the first and second piezoelectric layers.
113 Citations
27 Claims
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1. An acoustic resonator device, comprising:
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an acoustic resonant structure including first and second electrodes abutting opposite sides of a resonant volume free of any interposing electrodes, and first and second piezoelectric layers disposed for acoustic vibrations in the resonant volume and having different respective acoustical resonance characteristics and respective piezoelectric axes oriented in different directions;
wherein the acoustic resonant structure has resonant electric responses at first and second resonant frequencies respectively determined at least in part by the acoustical resonance characteristics of the first and second piezoelectric layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of making an acoustic resonator device, comprising:
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forming a first electrode over an acoustic isolation structure;
forming a first piezoelectric layer over the first electrode;
forming a second piezoelectric layer over the first piezoelectric layer without any interposing electrodes, wherein the first and second piezoelectric layers have different respective acoustical resonance characteristics and respective piezoelectric axes oriented in different directions; and
forming a second electrode over the second piezoelectric layer. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of making a device, comprising:
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depositing a first piezoelectric layer having a first piezoelectric axis oriented in a first direction;
depositing a seed layer on the first piezoelectric layer; and
depositing on the seed layer a second piezoelectric layer having a second piezoelectric axis oriented in a second direction different from the first direction. - View Dependent Claims (26, 27)
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Specification