Integrated transformer configuration

• US 6,927,662 B2
• Filed: 07/18/2003
• Issued: 08/09/2005
• Est. Priority Date: 07/18/2002
• Status: Active Grant

• Current Assignee: Infineon Technologies AG, Hutchinson Technology Incorporated (TDK Corporation)
• Original Assignee: Infineon Technologies AG
• Inventors: Strzalkowski, Bernhard, Kahlmann, Frank, Werner, Wolfgang
• Primary Examiner(s): MAI, ANH T
• Application Number:
  US10/622,934
• Publication Number:
  US 20040056749A1
• Time in Patent Office: 753 Days
• Field of Search: 336/200, 336/223, 336/232, 296/020.1
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48472 the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
• CPC Class Codes: H01L 23/645 Inductive arrangements H01L23/647, H01L23/66 take precedence
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/13091 Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
• CPC Class Codes: H01L 2924/30107 Inductance

Abstract

The present invention relates to an integrated transformer configuration having a first coil formed from an electrically conductive material having a spiral course with an essentially rectangular cross section. The transformer has a second coil with a spiral course. The first and the second coils are arranged such that they are electrically insulated from one another. The ratio between the height and the width of the rectangular cross section of the first coil is greater than 1.

Claims

1. An integrated transformer configuration, comprising:

a first coil formed from an electrically conductive material having a spiral course with an essentially rectangular cross section;

a second coil having a spiral course;

a transmitting device connected to one coil selected from a group consisting of said first coil and said second coil; and

a receiver device connected to another coil selected from a group consisting of said first coil and said second coil;

said first coil and said second coil being electrically insulated from one another;

said rectangular cross section of said first coil having a height and a width; and

a ratio between said height and said width of said rectangular cross section of said first coil being greater than 1.

2. The integrated transformer configuration according to claim 1, wherein said semiconductor body is part of an SOI substrate.

3. The integrated transformer configuration according to claim 1,

a first semiconductor body formed with a first trench having a spiral course and extending vertically into said semiconductor body, said first coil being formed in said first trench;

a second semiconductor body, said second coil formed in or on said second semiconductor body, said first semiconductor body and said second semiconductor body configured one above another, said first semiconductor body and said second semiconductor body being insulated from one another;

said transmitting device integrated in one semiconductor body selected from a group consisting of said first semiconductor body and said second semiconductor body; and

said receiver device integrated in another semiconductor body selected from a group consisting of said first semiconductor body and said second semiconductor body.

4. The integrated transformer configuration according to claim 1, further comprising:

a first semiconductor body formed with a first trench having a spiral course and extending vertically into said semiconductor body, said first coil being formed in said first trench, said second coil formed above or below said first coil, said second coil formed in said first trench; and

said transmitting device and said receiver device integrated in said first semiconductor body.

5. The integrated transformer configuration according to claim 1, further comprising:

a plurality of semiconductor bodies including a first semiconductor body formed with a first trench having a spiral course and extending vertically into said semiconductor body, said first coil being formed in said first trench, said second coil formed above or below said first coil, said second coil formed in said first trench; and

said transmitting device and said receiver device integrated in different ones of said plurality of semiconductor bodies; and

one of said transmitting device and said receiver device being integrated in said first semiconductor body.

6. The integrated transformer configuration according to claim 1, further comprising:

a semiconductor body; and

an insulation layer formed above said semiconductor body;

said first coil formed in said insulation layer.

7. The integrated transformer configuration according to claim 6, further comprising:

a metalization plane;

said insulation layer being part of said metalization plane.

8. The integrated transformer configuration according to claim 6, wherein:

said first coil is formed from a plurality of component coils configured one above another in said insulation layer; and

said plurality of component coils are electrically connected to one another.

9. The integrated transformer configuration according to claim 6, wherein:

said second coil is formed above said semiconductor body; and

said second coil is formed in said insulation layer and is insulated from said semiconductor body.

10. The integrated transformer configuration according to claim 9, wherein said second coil is formed between said first coil and said semiconductor body.

11. The integrated transformer configuration according to claim 6, wherein said second coil is formed in said semiconductor body.

12. The integrated transformer configuration according to claim 11, wherein said second coil is formed from a heavily doped semiconductor material.

13. The integrated transformer configuration according to claim 1, wherein said ratio between said height and said width of said rectangular cross section of said first coil is greater than 3.

14. The integrated transformer configuration according to claim 1, further comprising:

a first semiconductor body formed with a first trench having a spiral course and extending vertically into said semiconductor body;

said first coil being formed in said first trench.

15. The integrated transformer configuration according to claim 14, further comprising:

a second semiconductor body;

said second coil formed in or on said second semiconductor body;

said first semiconductor body and said second semiconductor body configured one above another; and

said first semiconductor body and said second semiconductor body being insulated from one another.

16. The integrated transformer configuration according to claim 14, further comprising:

a second semiconductor body; and

an insulation layer formed between said first semiconductor body and said second semiconductor body;

said first semiconductor body and said second semiconductor body configured one above another;

said first semiconductor body and said second semiconductor body being insulated from one another by said insulation layer; and

said second coil formed in said insulation layer.

17. The integrated transformer configuration according to claim 14, wherein:

said second coil is formed above or below said first coil; and

said second coil is formed in said first trench.

18. The integrated transformer configuration according to claim 14, further comprising:

an insulation layer formed above said first semiconductor body;

said second coil formed in said insulation layer.

19. The integrated transformer configuration according to claim 18, further comprising:

a metalization plane;

said insulation layer being part of said metalization plane.

20. The integrated transformer configuration according to claim 14, wherein said first semiconductor body includes a heavily doped semiconductor material forming said second coil.

21. The integrated transformer configuration according to claim 20, wherein said heavily doped semiconductor material forming said second coil is formed below said first trench with said first coil.

22. The integrated transformer configuration according to claim 20, wherein said heavily doped semiconductor material forming said second coil is formed adjacent said first trench with said first coil.

23. An integrated transformer configuration, comprising:

a first coil formed from an electrically conductive material having a spiral course with an essentially rectangular cross section;

a second coil having a spiral course;

a first semiconductor body formed with a first trench having a spiral course and extending vertically into said semiconductor body, said first semiconductor body having a heavily doped semiconductor material forming said second coil;

said first coil formed in said first trench;

said first coil and said second coil being electrically insulated from one another;

said rectangular cross section of said first coil having a height and a width; and

a ratio between said height and said width of said rectangular cross section of said first coil being greater than 1.

24. The integrated transformer configuration according to claim 23, wherein said heavily doped semiconductor material forming said second coil is formed below said first trench with said first coil.

25. The integrated transformer configuration according to claim 23, wherein said heavily doped semiconductor material forming said second coil is formed adjacent said first trench with said first coil.

26. An integrated transformer configuration, comprising:

a first coil formed from an electrically conductive material having a spiral course with an essentially rectangular cross section;

a second coil having a spiral course;

a first semiconductor body formed with a first trench having a spiral course and extending vertically into said semiconductor body;

said first coil being formed in said first trench;

said second coil being formed above or below said first coil;

said second coil being formed in said first trench;

said first coil and said second coil being electrically insulated from one another;

said rectangular cross section of said first coil having a height and a width; and

a ratio between said height and said width of said rectangular cross section of said first coil being greater than 1.

27. An integrated transformer configuration, comprising:

a first coil formed from an electrically conductive material having a spiral course with an essentially rectangular cross section;

a second coil having a spiral course;

a semiconductor body;

an insulation layer formed above said semiconductor body;

said first coil formed in said insulation layer;

said first coil and said second coil being electrically insulated from one another;

said rectangular cross section of said first coil having a height and a width;

a ratio between said height and said width of said rectangular cross section of said first coil being greater than 1;

said first coil is formed from a plurality of component coils configured one above another in said insulation layer; and

said plurality of component coils are electrically connected to one another.