Multiple stage, stage assembly having independent stage bases
First Claim
1. A stage assembly comprising:
- a first stage that retains a first device;
a second stage that retains a second device;
a mover assembly that moves the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;
a first support assembly that supports the first stage independently from the second stage; and
a second support assembly that supports the second stage independently from the first stage.
1 Assignment
0 Petitions
Accused Products
Abstract
A stage assembly (10) for independently moving and positioning a first device (26A) and a second device (26A) in an operation area (25) is provided herein. The stage assembly (10) includes a stage base (12), a first stage (14), a first mover assembly (15), a second stage (16), and a second mover assembly (18). The first mover assembly (15) moves the first stage (14) and the first device (26A) into the operational area (25) and the second mover assembly (18) moves the second stage (16) and the second device (26B) into the operational area (25). The present stage assembly (10) reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (14), (16). This improves the positioning performance of the stage assembly (10). Further, for an exposure apparatus (30), this allows for more accurate positioning of two semiconductor wafers (28) relative to a reticle (32) or some other reference.
33 Citations
53 Claims
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1. A stage assembly comprising:
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a first stage that retains a first device;
a second stage that retains a second device;
a mover assembly that moves the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;
a first support assembly that supports the first stage independently from the second stage; and
a second support assembly that supports the second stage independently from the first stage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:
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a first stage that retains the first device;
a second stage that retains the second device;
a mover assembly that moves the first stage and the second stage into the operational area;
a first base section that supports the first stage, wherein the first base section includes a first base bottom, a left first base guide and a right first base guide; and
a second base section that supports the second stage, wherein the second base section includes a second base bottom, a left second base guide and a right second base guide, wherein a portion of at least one of the first base guides extends over the second base section. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:
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a first stage that retains the first device;
a second stage that retains the second device;
a mover assembly that moves the first stage and the second stage into the operational area;
a first base section that supports the first stage, wherein the first base section includes a first base bottom, a left first base guide and a right first base guide; and
a second base section that supports the second stage, wherein the second base section includes a second base bottom, a left second base guide and a right second base guide, wherein one of the first base guides is positioned between the second base guides. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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26. A stage assembly comprising:
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a first stage that retains a first device;
a second stage that retains a second device;
a mover assembly that moves the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;
a first base section that supports the first stage;
a second base section that supports the second stage; and
a first base flexible support that secures the first base section to a mounting base, the first base section being supported independently from the second base section. - View Dependent Claims (27, 28, 29, 30)
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31. A method for making a stage assembly comprising the steps of:
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providing a first stage that retains a first device;
providing a second stage that retains a second device;
connecting a first mover assembly to the first stage, the first mover assembly moving the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;
supporting the first stage with a first base section; and
supporting the second stage with a second base section that is different from the first base section. - View Dependent Claims (32, 33)
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34. A method for making a stage assembly that independently moves a first device and a second device into an operational area, the method comprising the steps of:
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providing a first stage that retains the first device;
providing a second stage that retains the second device;
connecting a mover assembly to the first stage and the second stage, the mover assembly moving the first stage and the first device into the operational area and the second stage and the second device into the operational area;
supporting the first stage with a first base section that includes a first base bottom, a left first base guide and a right first base guide; and
supporting the second stage with a second base section that includes a second base bottom, a left second base guide and a right second base guide. - View Dependent Claims (35, 36, 37, 38, 39)
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40. A method for making a stage assembly that independently moves a first device and a second device into an operational area, the method comprising the steps of:
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providing a first stage that retains the first device;
providing a second stage that retains the second device;
connecting a mover assembly to the first stage and the second stage, the mover assembly moving the first stage and the first device into the operational area and the second stage and the second device into the operational area;
supporting the first stage with a first base section;
supporting the second stage with a second base section; and
securing the first base section to a mounting base with a first base flexible support. - View Dependent Claims (41, 42, 43, 44)
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45. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:
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a first stage that retains the first device;
a second stage that retains the second device;
a mover assembly that moves the first stage and the second stage into the operational area;
a first support assembly that supports the first stage independently from the second stage, the first support assembly including a first base section; and
a second support assembly that supports the second stage independently from the first stage, the second support assembly including a second base section. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52)
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53. A stage assembly that independently moves a first device and a second device into an operational area, the stage assembly comprising:
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a first stage that retains the first device;
a second stage that retains the second device;
a mover assembly that moves the first stage and the second stage into the operational area;
a first base section that supports the first stage;
a second base section that supports the second stage;
a first base flexible support that secures the first base section to a mounting base; and
a second base flexible support that secures the second base section to the mounting base.
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Specification