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Multiple stage, stage assembly having independent stage bases

  • US 6,927,838 B2
  • Filed: 02/27/2001
  • Issued: 08/09/2005
  • Est. Priority Date: 02/27/2001
  • Status: Expired due to Fees
First Claim
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1. A stage assembly comprising:

  • a first stage that retains a first device;

    a second stage that retains a second device;

    a mover assembly that moves the first stage and the second stage independently of each other, the first stage and the second stage being movable over a common operational area in each movement range;

    a first support assembly that supports the first stage independently from the second stage; and

    a second support assembly that supports the second stage independently from the first stage.

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