Microfabricated elastomeric valve and pump systems
First Claim
1. A microfluidic structure comprising:
- an underlying substrate;
a first elastomer layer overlying the substrate, the first elastomer layer bearing in a bottom surface a first recess; and
a second elastomer layer overlying the first elastomer layer, the second elastomer layer bearing in a bottom surface a second recess having an arched ceiling; and
a membrane portion of the first elastomer layer defined between the first recess and the second recess, the membrane portion deflectable upward into the second recess to conform with and seal against the arched ceiling.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Citations
12 Claims
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1. A microfluidic structure comprising:
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an underlying substrate;
a first elastomer layer overlying the substrate, the first elastomer layer bearing in a bottom surface a first recess; and
a second elastomer layer overlying the first elastomer layer, the second elastomer layer bearing in a bottom surface a second recess having an arched ceiling; and
a membrane portion of the first elastomer layer defined between the first recess and the second recess, the membrane portion deflectable upward into the second recess to conform with and seal against the arched ceiling.
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- 2. The structure of claim 2 wherein the second elastomer layer is formed by curing an elastomer material against a nonelastomer mold bearing a convex feature.
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5. A microfluidic structure comprising:
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an underlying substrate;
a first elastomer layer overlying the substrate, a bottom surface of the first elastomer layer bearing a first recess;
a second elastomer layer overlying the first elastomer layer, a bottom surface of the second elastomer bearing a second recess; and
a third elastomer layer overlying the second elastomer layer, a bottom surface of the third elastomer layer bearing a third recess, such that a first deflectable membrane is defined from a portion of the first elastomer layer between the first recess and the second recess, and a second deflectable membrane is defined from a portion of the second elastomer layer between the second recess and the third recess. - View Dependent Claims (6, 7, 8, 9, 10, 11)
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12. A microfluidic structure comprising:
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an underlying substrate;
a first elastomer layer overlying the substrate, the first elastomer layer bearing in a bottom surface a first recess, the first recess patterned in a plurality of channels splitting into a plurality of parallel branches, the parallel branches reuniting; and
a second elastomer layer overlying the first elastomer layer, the second elastomer layer bearing in a bottom surface a second recess, the second recess patterned in a plurality of parallel channels oriented orthogonal to the parallel branches; and
membrane portions of the first elastomer layer defined between a widened portion of the parallel channels and the underlying parallel branches, the membrane portions deflectable into the parallel branches to control a flow of fluid through the parallel branches.
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Specification