Plasma treatment method and method of manufacturing optical parts using the same

• US 6,929,830 B2
• Filed: 06/02/2003
• Issued: 08/16/2005
• Est. Priority Date: 12/12/1997
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Tei, Goushu, Ohmi, Tadahiro, Hirayama, Masaki, Tanaka, Nobuyoshi
• Primary Examiner(s): PADGETT, MARIANNE L
• Application Number:
  US10/449,106
• Publication Number:
  US 20030203125A1
• Time in Patent Office: 806 Days
• Field of Search: 427/569, 427/574, 427/575, 427/579, 427/488, 427/489, 427/162, 427/167, 427/163.1, 427/163.4, 118/723.MW, 118/723.ME, 118/723.MA, 118/723.MR, 118/723.AN, 118/723.I, 118/723.IR
• US Class Current: 427/575
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/511 using microwave discharges
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence

Abstract

A method for treating a non-planar surface of an object by employing a plasma treatment apparatus in which a microwave dielectric has a non-planar surface corresponding to the surface of the object. A method for forming an optical part is also provided.

Claims

1. A method of manufacturing an optical part comprising the steps of:

providing on a holder an optical part having a convex or concave surface;

selecting a height of the holder carrying the optical part to provide a desired distance between the optical part and a microwave supply means;

making the holder revolve; and

treating the surface of the optical part using a plasma treatment apparatus in which a surface of the microwave supply means is located opposite to the convex or concave surface of the optical part and has a non-planar contour corresponding to the convex or concave surface of the optical part so as to approximately follow the surface of the optical part.

2. The method according to claim 1, wherein the surface of the microwave supply means is formed of a microwave-transmitting dielectric.

3. The method according to claim 1, wherein the microwave supply means has an assembly of a plurality of microwave-emitting plate members.

4. The method according to claim 1, wherein the microwave supply means has a plurality of openings for supplying gas for plasma excitation.

5. The method according to claim 1, wherein a film coat is formed on the optical part.

6. The method according to claim 1, wherein an antireflection or reflection-boosting thin film is formed on the optical part made of silicon oxide or calcium fluoride.

7. A method of uniformly treating a surface of an optical part comprising the steps of:

providing on a holder an optical part having a convex or concave surface where a radius of the optical part is at least 10 mm;

selecting a height of the holder carrying the optical part to so that a distance between the optical part and a surface of a microwave supply means, which faces the optical part and has a non-planar contour corresponding to the convex or concave surface of the optical part, is from 10 mm to 50 mm over an entire area where the optical part and so as to approximately follow the surface of the optical part the microwave supply means face each other; and

treating the surface of the optical part with plasma.

8. The method according to claim 7, wherein the surface of the microwave supply means is formed of a microwave-transmitting dielectric.

9. The method according to claim 7, wherein the microwave supply means has an assembly of a plurality of microwave-emitting plate members.

10. The method according to claim 7, wherein the microwave supply means has a plurality of openings for supplying gas for plasma excitation.

11. The method according to claim 7, wherein a thin film is formed on the surface of the optical part.

12. The method according to claim 7, wherein an antireflection or reflection-boosting thin film is formed on the optical part made of silicon oxide or calcium fluoride.