Integrated chemical microreactor, thermally insulated from detection electrodes, and manufacturing and operating methods therefor
First Claim
1. A method for manufacturing a microreactor, comprising:
- forming a monolithic body, said step of forming a monolithic body including forming a semiconductor material region;
forming a buried channel in said semiconductor material region;
forming a first and a second access cavity, said first and a second access cavity extending in said monolithic body as far as said buried channel;
forming a suspended diaphragm laterally to, but not over, said buried channel; and
forming a detection electrode on top of said suspended diaphragm.
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Abstract
Integrated microreactor, formed in a monolithic body and including a semiconductor material region and an insulating layer; a buried channel extending in the semiconductor material region; a first and a second access trench extending in the semiconductor material region and in the insulating layer, and in communication with the buried channel; a first and a second reservoir formed on top of the insulating layer and in communication with the first and the second access trench; a suspended diaphragm formed by the insulating layer, laterally to the buried channel; and a detection electrode, supported by the suspended diaphragm, above the insulating layer, and inside the second reservoir.
28 Citations
13 Claims
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1. A method for manufacturing a microreactor, comprising:
- forming a monolithic body, said step of forming a monolithic body including forming a semiconductor material region;
forming a buried channel in said semiconductor material region;
forming a first and a second access cavity, said first and a second access cavity extending in said monolithic body as far as said buried channel;
forming a suspended diaphragm laterally to, but not over, said buried channel; and
forming a detection electrode on top of said suspended diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- forming a monolithic body, said step of forming a monolithic body including forming a semiconductor material region;
Specification