MEMS optical switches with guaranteed switching status

• US 6,931,173 B1
• Filed: 08/14/2003
• Issued: 08/16/2005
• Est. Priority Date: 08/14/2003
• Status: Active Grant

• Current Assignee: Alliance Fiber Optic Products Incorporated (Corning Incorporated)
• Original Assignee: Alliance Fiber Optic Products Incorporated (Corning Incorporated)
• Inventors: Wang, Xinzhong, Li, Yao, He, Chun
• Primary Examiner(s): Connelly-Cushwa, Michelle R.
• Application Number:
  US10/640,888
• Time in Patent Office: 733 Days
• Field of Search: 385 16- 24, 398 9- 38
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3568 characterised by the actuating force
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/359 of the position of the moving element itself during switching, i.e. without monitoring the switched beams
• CPC Class Codes: H04Q 11/0005 Switch and router aspects
• CPC Class Codes: H04Q 2011/003 using switches based on microelectro-mechanical systems [MEMS]
• CPC Class Codes: H04Q 2011/0039 Electrical control
• CPC Class Codes: H04Q 2011/0043 Fault tolerance
• CPC Class Codes: H04Q 2011/0083 Testing; Monitoring

Abstract

Techniques for controlling and monitoring MEMS optical switches are disclosed. In one embodiment, an electronic feedback loop is employed to determine a control signal to a MEMS switch actuator in accordance with an instruction. The control signal is so determined in such a way that the switching statuses are maximally guaranteed. To generate an appropriate control signal, AC or DC impedances of the MEMS switch are detected and used to configure the control signal to drive the switch. When it is detected that the impedance changes do not meet respective thresholds, the control signal is adjusted. In the case that the stiction happens, the switch actuator is overcharged, discharged and repeatedly applied for a limited time to overcome the stiction.

Claims

1. A method for controlling an optical switch, the method comprising:

applying an AC signal to an actuator of the optical switch being driven by a control signal from a power source, as a result, the actuator outputting an output signal including an AC component and a DC component;

rectifying the AC component to produce a rectified AC component;

determining an AC impedance and a DC impedance of the actuator;

reporting a failure of the optical switch if the determining of the DC impedance exceeds a first threshold; and

reporting a success of the optical switch if the determining of the AC impedance exceeds or is equal to a second threshold.

2. The method of claim 1, further comprising:

overcharging the control signal to a predetermined magnitude, if the determining of the AC impedance does not exceed the second threshold; and

applying the overcharged control signal to the actuator for a limited time to cause the optical switch to overcome stiction.

3. The method of claim 1, wherein the control signal is regulated by a microprocess unit (MPU).

4. The method of claim 3, wherein the MPU is configured to produce an initial control signal in accordance with a command to control the optical switch.

5. The method of claim 4, wherein the initial control signal is applied to the power source to generate the control signal.

6. The method of claim 4, wherein the initial control signal causes the overcharging of the control signal to the predetermined magnitude.

7. The method of claim 6, further comprising reporting a failure of the optical switch if a time in which the overcharged control signal is applied to the actuator exceeds a time limit.

8. The method of claim 4, wherein the initial control signal causes the control signal to increase gradually to a predetermined value for ringing damping.

9. The method of claim 1, further comprising:

determining a current switching status of the optical switch in reference to a command to control the optical switch; and

if there is no need to actuate the actuator, resetting the control signal;

if there is no need to actuate the actuator, increasing the control signal gradually to a predetermined value.

10. An optical switch system comprising:

at least an optical switch including an actuator, and a mirror;

a power source to produce a control signal to drive the actuator;

a microprocessor unit (MPU) configured to generate an initial signal to control the power source; and

a circuit coupled to the actuator to receive an output signal therefrom, the output signal including an AC component and a DC component that are coupled to the MPU for determining an AC impedance and a DC impedance of the actuator.

11. The optical switch system of claim 10, further comprising:

an AC power source producing an AC signal to be applied to the actuator for producing the AC component.

12. The optical switch system of claim 10, wherein, if the DC impedance does not exceed a first threshold, and the AC impedance exceeds or is equal to a second threshold, the control signal from the power source is overcharged, discharged and repeatedly applied to the actuator for a limited time to overcome stiction.

13. The optical switch system of claim 10, wherein, if the DC impedance exceeds a first threshold, the MPU reports a failure of the optical switch.

14. The optical switch system of claim 10, wherein, if the AC impedance exceeds or is equal to a second threshold, the MPU reports a success of the optical switch.

15. The optical switch system of claim 10, wherein the optical switch is formed on a substrate.

16. The optical switch system of claim 15, wherein the circuit is also formed on the substrate.

17. The optical switch system of claim 16, wherein the circuit includes an AC amplifier and a DC amplifier to amplify the AC component and the DC component, respectively.

18. The optical switch system of claim 17, wherein the circuit further includes a rectifier and a low-pass filter to produce a representation of the amplified AC component.

19. The optical switch system of claim 18, wherein the circuit further includes an analog MUX receiving the amplified DC component as well as the representation of the amplified AC component.

20. The optical switch system of claim 19, wherein both of the DC component and AC component are subsequently coupled to the MPU for forming a feedback system to precisely control the actuator.