Manufacturing of micro-objects such as miniature diamond tool tips

• US 6,931,710 B2
• Filed: 02/14/2003
• Issued: 08/23/2005
• Est. Priority Date: 01/30/2001
• Status: Expired due to Term

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Hong, John C.
• Application Number:
  US10/367,113
• Publication Number:
  US 20050115047A1
• Time in Patent Office: 921 Days
• Field of Search: 294/28, 294/64, 294/67, 294/69, 295/05, 295/25, 29/34.R, 295/66, 295/661, 297/18, 292/835, 206/372
• US Class Current: 29/467
• CPC Class Codes: G01B 11/02 for measuring length, width or thickness G01B11/08 takes precedence
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/49901 Sequentially associating parts on stationary aligning means
• CPC Class Codes: Y10T 29/53078 with means to fasten by frictional fitting
• CPC Class Codes: Y10T 29/53996 by deforming

Abstract

Techniques for affixing a micro-object to a mounting structure at a desired relative orientation. A shaped portion of a workpiece is caused to become embedded in a reference structure at a first relative orientation. The workpiece is parted into first and second portions, the first portion of which includes the embedded shaped portion of the workpiece and defines the micro-object. The reference structure is aligned with the mounting structure at a second relative orientation, the first and second relative orientations defining the desired relative orientation of the micro-object and the mounting structure. The micro-object is bonded to the mounting structure while the micro-object remains embedded in the reference structure and the reference structure remains aligned with the mounting structure at the second relative orientation. The micro-object is separated from the reference structure, whereupon the micro-object remains in the desired relative orientation with respect to the mounting structure. The micro-object may have dimensions less than 200 microns, and possibly on the order of 15–25 microns.

Claims

1. A method of affixing a micro-object to a mounting structure at a desired relative orientation, the method comprising:

embedding a shaped portion of a workpiece in a reference structure at a first relative orientation;

parting the workpiece into first and second portions, the first portion of which includes the embedded shaped portion of the workpiece and defines the micro-object;

aligning the reference structure with the mounting structure at a second relative orientation, the first and second relative orientations defining the desired relative orientation of the micro-object and the mounting structure;

bonding the micro-object to the mounting structure while the micro-object remains embedded in the reference structure and the reference structure remains aligned with the mounting structure at the second relative orientation; and

separating the micro-object from the reference structure, whereupon the micro-object remains in the desired relative orientation with respect to the mounting structure.

2. The method of claim 1 wherein the reference structure and the mounting structure are aligned so as to define a desired relative spatial position between the reference structure and the mounting structure.

3. The method of claim 1, wherein the micro-object has dimensions that are less than 200 microns.

4. The method of claim 1, wherein the micro-object has dimensions that are less than 100 microns.

5. The method of claim 1, wherein the micro-object has dimensions that are on the order of 15–

25 microns.

6. The method of claim 1, wherein the micro-object is aligned relative to the mounting structure to an angular precision of ±

5 degrees or better.

7. The method of claim 1 wherein:

the reference structure has a trapping layer disposed thereon;

embedding the shaped portion of the workpiece in the reference structure includes inserting the shaped portion into the trapping layer; and

separating the micro-object from the reference structure includes withdrawing the micro-object from the trapping layer.

8. The method of claim 1 wherein:

the reference structure has a MEMS device connected thereto;

embedding the shaped portion of the workpiece in the reference structure includes operating the MEMS device to restrain the shaped portion; and

separating the micro-object from the reference structure operating the MEMS device to release the shaped micro-object.

9. A method of fabricating a composite article having a micro-object supported on a mounting structure at a desired orientation with respect to the support structure, the method comprising:

providing a workpiece having first and second portions, the first portion of the workpiece having a shape suitable for defining at least a portion of the micro-object;

immobilizing the first portion of the workpiece relative to a reference structure with the first portion of the workpiece at a first orientation with respect to the reference structure;

separating the first portion of the workpiece from the second portion of the workpiece while maintaining the first portion of the workpiece immobilized relative to the reference structure at the first orientation with respect to the reference structure, whereupon the first portion of the workpiece, so separated, defines the micro-object, with the micro-object, so separated, remaining at the first orientation with respect to the reference structure;

aligning the reference structure with the mounting structure at a second orientation with respect to the mounting structure, the first orientation of the micro-object relative to the reference structure and the second orientation of the reference structure relative to the mounting structure defining the desired orientation of the micro-object with respect to the mounting structure;

bonding the micro-object to the mounting structure while the micro-object remains immobilized relative to the reference structure and the reference structure remains aligned with the mounting structure at the second orientation with respect to the mounting structure; and

releasing the micro-object from the reference structure.

10. The method of claim 9 wherein the reference structure and the mounting structure are aligned so as to define a desired relative spatial position between the reference structure and the mounting structure.

11. The method of claim 9, wherein the micro-object has dimensions that are less than 200 microns, and the micro-object is aligned relative to the mounting structure to an angular precision of ±

5 degrees or better.

12. The method of claim 9, wherein the micro-object has dimensions that are on the order of 15–

25 microns.

13. The method of claim 9, wherein said bonding comprises welding a first bonding layer disposed on a surface of the micro-object to a second bonding layer disposed on a surface of the mounting structure, the first and second bonding layers being of the same material.

14. The method of claim 9, wherein said bonding comprises soldering the micro-object to the mounting structure.

15. The method of claim 9 wherein:

the reference structure has a trapping layer disposed thereon;

immobilizing the first portion of the workpiece relative to the reference structure includes inserting the first portion of the workpiece into the trapping layer; and

releasing the micro-object from the reference structure includes withdrawing the micro-object from the trapping layer.

16. The method of claim 9 wherein:

the reference structure has a MEMS device connected thereto;

immobilizing the first portion of the workpiece relative to the reference structure includes operating the MEMS device to restrain the first portion of the workpiece; and

releasing the micro-object from the reference structure includes operating the MEMS device to no longer restrain the first portion of the workpiece.

17. A composite article of manufacture comprising a micro-object mounted on a mounting structure where the dimensions of the micro-object are less than 200 microns, and the micro-object is aligned relative to the mounting structure to an angular precision of better than ±

1 degree, wherein the micro-object is formed by;

immobilizing a shaped portion of a workpiece relative to a reference structure, the workpiece having a significantly larger dimensions than dimensions of the shaped portion;

aligning the workpiece relative to the reference structure;

parting the workpiece to leave a parted portion includes the shaped portion still immobilized and aligned relative to the reference structure, the parted portion defining the micro-object;

aligning the reference structure relative to the mounting structure;

bonding the parted portion to the mounting structure; and

separating the parted portion from the reference structure.

18. A method of affixing a tool head to a tool body, the method comprising:

causing a shaped portion of a workpiece to penetrate a trapping structure at a desired orientation;

parting said workpiece, the tool head comprising a parted portion of said workpiece that includes said shaped portion and an exposed portion, with said shaped portion remaining in said trapping structure; and

fastening the tool body to the exposed portion of the tool head.

19. The method of claim 18, further comprising:

positioning a target surface and said workpiece relative to one another by means of a jig, said trapping structure being disposed upon said target surface.

20. The method of claim 19, wherein:

said target surface comprises a substantially transparent material.

21. The method of claim 19, wherein said causing comprises a force being axially applied to said workpiece by said jig.

22. The method of claim 19, wherein the tool body has an adhesive coating disposed on a surface thereof.

23. The method of claim 22, further comprising aligning said tool body surface with said target surface.

24. The method of claim 23, wherein said tool body surface and said target surface are aligned using corresponding marks disposed on both said tool body surface and said target surface.

25. The method of claim 22, wherein said fastening comprises applying said adhesive coated surface to the tool head.

26. The method of claim 25, wherein said fastening comprises setting said adhesive.

27. The method of claim 26, wherein said setting comprises irradiating said adhesive.

28. The method of claim 18, wherein:

said workpiece is coupled to a holder.

29. The method of claim 18, wherein:

said trapping structure comprises a layer of opaque material.

30. The method of claim 18, wherein said workpiece is parted by a laser.

31. The method of claim 18, further comprising determining the sharpness of the tool head.

32. The method of claim 31, wherein:

the tool head is transmissive; and

said determining the sharpness comprises directing light through the tool head and determining at least one characteristic of said light directed through the tool head.

33. The method of claim 18, further comprising, after said parting and prior to said fastening, transporting said trapping structure to a location remote from the site of said parting step.

34. The method of claim 18, wherein said workpiece is parted along a plane above said upper surface of said trapping structure.

35. The method of claim 18, further comprising removing the tool head from said trapping structure.

36. The method of claim 35, wherein said removing comprises drawing the tool body away from said trapping structure.

37. The method of claim 36, wherein:

said trapping structure is comprises a trapping layer; and

said removing further comprises treating an area of said trapping layer proximate to the tool head.

38. The method of claim 35, further comprising determining a profile record of the tool head.

39. The method of claim 38, wherein:

said trapping structure comprises a trapping layer;

said removing causes a negative form of the tool head to remain in said trapping layer; and

said determining comprises scanning said negative form.

40. A method of constructing a tool, the method comprising:

causing a shaped portion of a workpiece to penetrate a trapping structure;

parting said workpiece along a plane parallel to an upper surface of said trapping structure, whereby a parted portion of said workpiece includes said shaped portion and an exposed portion, and said shaped portion remains in said trapping structure; and

fastening a tool body to said exposed portion of said parted portion.

41. The method of claim 40, wherein said workpiece is parted by a laser.

42. The method of claim 40, further comprising determining the sharpness of said shaped portion.

43. The method of claim 42, wherein:

said shaped portion is transmissive; and

said determining comprises directing light through said shaped portion and determining at least one characteristic of said light directed through said shaped portion.

44. The method of claim 40, wherein said workpiece is parted along a plane above said upper surface of said trapping structure.

45. A method of constructing a tool, the method comprising:

causing a shaped portion of a workpiece to penetrate a trapping structure;

parting said workpiece, whereby a parted portion of said workpiece remains in said trapping structure;

positioning a tool body'"'"'s target surface and said workpiece relative to one another by means of a jig, said trapping structure being disposed upon said target surface; and

fastening said tool body to said parted portion.

46. The method of claim 45, wherein said causing comprises a force being axially applied to said workpiece by said jig.

47. A method of constructing a tool, the method comprising:

causing a shaped portion of a workpiece to penetrate a trapping structure;

parting said workpiece, whereby a parted portion of said workpiece remains in said trapping structure;

thereafter, transporting said trapping structure to a location remote from the site of said parting step; and

thereafter, fastening said tool body to said parted portion.

48. The method of claim 47, wherein said tool body has an adhesive coating disposed on a surface thereof.

49. The method of claim 48, further comprising aligning said tool body surface with said target surface.

50. The method of claim 49, wherein said aligning comprises aligning corresponding marks disposed on both said tool body surface and said target surface.

51. A tool, comprising:

a tool body; and

a tool head coupled with said tool body, wherein said tool head is a portion of a significantly larger workpiece from which said tool head was parted while disposed within a trapping layer;

said tool head having been aligned relative to said trapping layer by aligning said workpiece with the trapping layer prior to parting;

said trapping layer having been aligned with said tool body after parting.

52. The tool of claim 51, wherein:

said tool head is no more than 200 microns in length.

53. The tool of claim 51, wherein said tool head is transmissive.

54. The tool of claim 53, wherein said tool head has at least one characteristic associated therewith, said characteristic being determinable from light directed through said tool head.

55. The tool of claim 51, further comprising:

a first bonding layer disposed on the tool head; and

a second bonding layer disposed on the tool body, the first and second bonding layers being of the same material, the tool body and tool head being coupled by welding the first bonding layer to the second bonding layer.

56. The tool of claim 51, wherein the tool head is soldered to the tool body.

57. A method of affixing a tool head to a tool body, the method comprising:

causing a shaped portion of a workpiece to penetrate a trapping structure for fixing said workpiece in said trapping structure;

parting said workpiece along a plane parallel to an upper surface of said trapping structure for forming the tool head from said workpiece, the tool head having dimensions less than 200 microns and including said shaped portion and an exposed portion with said shaped portion remaining in said trapping structure; and

fastening said exposed portion of the tool body to the tool head while said shaped portion remains in said trapping structure.