Two-mask process for metal-insulator-metal capacitors and single mask process for thin film resistors

• US 6,933,191 B2
• Filed: 09/18/2003
• Issued: 08/23/2005
• Est. Priority Date: 09/18/2003
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Lustig, Naftali E., Dalton, Timothy J., Biery, Glenn A., Chen, Zheng G.
• Primary Examiner(s): Zarneke, David
• Assistant Examiner(s): Anya, Igwe U.
• Application Number:
  US10/605,260
• Publication Number:
  US 20050064658A1
• Time in Patent Office: 705 Days
• Field of Search: 438/239, 438/240, 438/244, 438/253, 438/250, 438/768, 438/396, 438/635, 438/393, 438/636
• US Class Current: 438/239
• CPC Class Codes: H01L 21/0274 Photolithographic processes
• CPC Class Codes: H01L 28/20 Resistors
• CPC Class Codes: H01L 28/40 Capacitors

Abstract

MIM capacitors and thin film resistors are fabricated with at least one less lithographic step than the prior art methods. The process step reduction is realized by using semi-transparent metallic electrodes, fabricated with a two-mask process, which provides for direct alignment, and eliminates the need for alignment trenches in an additional layer.

Claims

1. A method of fabricating a MIM capacitor comprising:

providing a semiconductor wafer; and

depositing semi-transparent metal layers for top and bottom electrodes of said MIM capacitor using a two-mask process for direct alignment;

said method eliminating the need for alignment trenches in an insulating or oxide layer.

2. The method of claim 1 wherein said metal layers comprise a low resistance, high transmittance metal.

3. The method of claim 1 wherein said semi-transparent metal layers are at least transparent in a portion of the visible spectrum.

4. The method of claim 1 wherein said semi-transparent metal layers comprise indium-tin-oxide.

5. A method of fabricating a MIM capacitor comprising:

providing a semiconductor wafer;

depositing semi-transparent metal layers on said semiconductor wafer for top and bottom electrodes of said MIM capacitor using a two-mask process for direct alignment and eliminating the need for alignment trenches in an insulating or oxide layer;

depositing a layer of dielectric material between said semi-transparent metal layers;

patterning and etching said top and bottom electrodes from said dielectric material and said semi-transparent metal layers, such that said bottom electrode aligns to a previous metal interconnect layer;

depositing an interlayer dielectric over said top and bottom electrodes;

forming lines through said interlayer dielectric to said top and bottom electrodes; and

depositing a metal liner and metal fill in said lines.

6. The method of claim 5 further comprising planarizing said interlayer dielectric.

7. The method of claim 5 further comprising chemical-mechanical polishing said MIM capacitor after depositing said metal liner and metal fill.

8. A method of fabricating a MIM capacitor on a semiconductor wafer having an insulating layer thereon, said method comprising:

providing said semiconductor wafer having said insulating layer thereon;

depositing alternate layers of a dielectric material and a semi-transparent metal on said insulating layer;

patterning and etching said dielectric layer and said semi-transparent metal layer to form a top electrode;

performing direct alignment to a previous metal interconnect layer through said semi-transparent metal layer;

patterning and etching said capacitor dielectric layer and said semi-transparent metal layer to form a bottom electrode;

depositing an oxide interlayer dielectric over said top and bottom electrodes;

patterning and etching said oxide interlayer dielectric to form lines to said top and bottom electrodes; and

depositing a metal liner and metal fill in said lines.

9. The method of claim 8 wherein said semi-transparent metal comprises a low resistance, high transmittance metal, at least semi-transparent in a portion of the visible spectrum.

10. The method of claim 8 wherein said semi-transparent metal comprises indium-tin-oxide.

11. The method of claim 10 further comprising indium-tin-oxide metal having a resistivity in the range of 230 mohm-cm after exposure to an annealing temperature of approximately 250°

C. in a N₂H₂ atmosphere.

12. The method of claim 8 wherein said capacitor dielectric comprises SiNx.

13. The method of claim 8 further comprising planarizing said interlayer dielectric after depositing said interlayer dielectric.

14. The method of claim 8 further comprising removing excessive conductive material by chemical-mechanical polishing after depositing said metal liner and metal fill deposition.

15. The method of claim 8 wherein said patterning comprises applying a photoresist mask and developing said mask with ultraviolet light.

16. The method of claim 8 wherein said etching comprises performing reactive ion etching.

17. A method of fabricating a thin film resistor comprising:

providing a semiconductor wafer;

depositing a SiNx cap layer over an interconnect copper layer;

depositing a layer of semi-transparent resistor material over said SiNx cap; and

patterning and etching said semi-transparent resistor material with a photoresist mask, such that said resistor material aligns to said interconnect copper layer.

18. The method of claim 17 wherein said resistor material is indium-tin-oxide, or other metallic material at least transparent in a portion of the visible spectrum.

19. A method of fabricating a MIM capacitor, said method comprising:

providing a semiconductor wafer having an insulating layer thereon;

depositing alternate layers of a dielectric material and a semi-transparent metal on said insulating layer, wherein said semi-transparent metal comprises indium-tin-oxide having a resistivity in the range of 230 mohm-cm after exposure to an annealing temperature of approximately 250°

C. in a N₂H₂ atmosphere;

patterning and etching said dielectric layer and said semi-transparent metal layer to form a top electrode;

patterning and etching said capacitor dielectric layer and said semi-transparent metal layer to form a bottom electrode, such that said bottom electrode aligns to a previous metal interconnect layer;

depositing an oxide interlayer dielectric over said top and bottom electrodes;

patterning and etching said oxide interlayer dielectric to form lines to said top and bottom electrodes; and

depositing a metal liner and metal fill in said lines.

20. A method of fabricating a thin film resistor comprising:

providing a semiconductor wafer;

depositing a SiNx cap layer over an interconnect copper layer on said semiconductor wafer;

depositing a layer of semi-transparent resistor material over said SiNx cap to eliminate a mask alignment process step; and

patterning and etching said semi-transparent resistor material with a photoresist mask, such that said resistor material aligns to said interconnect copper layer.

21. The method of claim 20 wherein said resistor material is indium-tin-oxide, or other metallic material at least transparent in a portion of the visible spectrum.