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Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method

  • US 6,934,009 B2
  • Filed: 05/30/2002
  • Issued: 08/23/2005
  • Est. Priority Date: 05/31/2001
  • Status: Expired due to Fees
First Claim
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1. An illumination apparatus comprising:

  • an optical integrator including multiple optical systems for receiving light from a light source, and for producing multiple beams for illuminating a plane to be illuminated, an incidence plane of each said multiple optical systems and the plane to be illuminated being arranged optically conjugate with each other; and

    a device for forming polarization distribution of light at the incidence plane, the light entering at least part of the multiple optical systems, whereby the different areas on the plane to be illuminated may be illuminated under different polarization conditions.

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