Method and a device for bending compensation in intensity-based fibre-optical measuring systems

• US 6,934,015 B1
• Filed: 06/16/2000
• Issued: 08/23/2005
• Est. Priority Date: 06/18/1999
• Status: Expired due to Term

• Current Assignee: FISO Technologies Inc.
• Original Assignee: Samba Sensors AB
• Inventors: Höjer, Svante, Vidovic, Nevio, Krantz, Martin
• Primary Examiner(s): Nguyen, Tu T.
• Application Number:
  US10/018,220
• Time in Patent Office: 1,894 Days
• Field of Search: 356/73.1, 25022714-22723, 385 11- 13, 385115-119
• US Class Current: 356/73.1
• CPC Class Codes: G01D 5/268 using optical fibres G01D5/28 - G01D5/38 take precedence
• CPC Class Codes: G01D 5/35303 using a reference fibre, e.g. interferometric devices
• CPC Class Codes: G01L 19/00 Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
• CPC Class Codes: G01M 11/088 of optical fibres; Mechanical features associated with the optical testing of optical fibres

Abstract

Compensation is provided for bending of an optical fibre in intensity-based optical measuring systems. A measuring signal and a reference signal of different wavelengths are generated and transmitted through an optical connection towards a sensor element. The reference signal is not influenced in the sensor element. The measuring and reference signals are detected and compensation is carried out for bending of the optical connection using correction data. The correction data is based upon pre-store data concerning the relationship between the measured reference signal and the measured measuring signal as a function of the bending influence on the optical connection. Devices and methods according to the invention allow for measurements with an optical pressure measuring system that exhibit effective compensation for any bending of the optical connection.

Claims

1. A method of compensating for bending of an optical fibre in light intensity-based optical measuring systems, said light intensity-based optical measuring systems comprising a sensor element connected to a measuring and control unit via optical fibre and being adapted for providing a signal corresponding to a measurement of a physical parameter, said method comprising

generating a measuring light signal;

transmitting the measuring light signal through the optical fibre towards the sensor element;

generating a reference light signal;

transmitting the reference light signal through the same optical fibre without being affected by the sensor element due to the measuring light being separated from the reference light, wherein said measuring light signal and said reference light signal have different wavelengths;

detecting said measuring light signal after being influenced by the sensor element;

detecting said reference light signal after being transmitted through the optical fibre and after being reflected by said sensor element;

compensating for bending of the optical fibre by reference to correction data based upon pre-stored data concerning a relationship between the measured reference light signal and the measured measuring light signal as a function of the bending influence upon said optical fibre, wherein said measuring light signal causes optical interference in a cavity associated with the sensor element.

2. The method according to claim 1, wherein said correction data includes a stored table or function, describing a relationship measured beforehand, between the reference light signal and the measuring light signal, as a function of the bending influence.

3. A method according to claim 1, wherein said sensor is utilized for pressure measurements, said sensor element including a membrane being affected by the pressure surrounding the sensor element.

4. The method according to claim 1, further comprising guiding the measuring light signal into the cavity of the sensor element;

and reflecting the reference light signal from the sensor element without entry into the cavity.

5. The method according to claim 1, wherein characteristics of material forming at least one surface of said cavity permits guiding the measuring light signal into the cavity and causes reflectance of the reference light signal from the cavity.

6. The method of claim 1, wherein the wavelength of the measuring light signal is selected to exceed a limit value and the wavelength of the reference light signal is selected to be less than said limit value.

7. The method of claim 6, wherein said limit value is based on a characteristic of the senor element material.

8. The method of claim 6, wherein dimensions of the cavity are determined based on a selected wavelength of the measuring light signal, a selected wavelength of the reference light signal and the limit value.

9. A device for measurements in optical measuring systems comprising:

a sensor element adapted for providing a signal corresponding to a measurement of a physical parameter in connection with the sensor element;

an optical fibre connected to the sensor element;

a first light source and a second light source arranged at the opposite end of the optical fibre and functioning to emit a first light signal and a second light signal, respectively, at different wavelengths, the first light signal defining a measuring signal, transmitted towards the sensor element through the optical fibre, and the second light signal defining a reference signal, transmitted through the optical fibre without being affected by the sensor element due to the measuring light being separated from the reference light;

a first detector intended to detect a light signal modulated by the sensor element;

a second detector intended to detect a light signal reflected by the sensor element; and

a measuring and control unit, to which said detectors are connected, whereby said measuring and control unit comprising means for processing the values detected by said detectors, means for storing data concerning the relationship between the measured reference signal and the measured measuring signal as a function of the bending influence upon said optical connection, and means for correcting the value detected by the first detector in dependence of said correction data, wherein said sensor element comprising a cavity, shaped so as to create optical interference when feeding said measuring signal into the cavity.

10. The device according to claim 9, wherein said cavity includes a plurality of molecular silicone and/or silicone dioxide layers which have been etched.

11. The device according to claim 10, whereby said cavity includes bonding layers.

12. The device of claim 9, wherein the measurement light signal is guided into the cavity, whereas the reference light signal is reflected by the sensor element without entering the cavity.

13. The device of claim 9, wherein characteristics of material forming at least one surface of said cavity permits guiding of the measuring signal into the cavity and causes reflectance of the reference signal from the cavity.

14. The device of claim 9, wherein the wavelength of the first light signal exceeds a limit value and the wavelength of the second light signal is less than the limit value.

15. The device of claim 14, wherein said limit value is based on a characteristic of the sensor element material.

16. The device of claim 14, wherein dimensions of the cavity are determined based on the first wavelength, the second wavelength and the limit value.