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Method for improving OPC modeling

  • US 6,934,929 B2
  • Filed: 01/13/2003
  • Issued: 08/23/2005
  • Est. Priority Date: 01/13/2003
  • Status: Expired due to Fees
First Claim
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1. A method of tuning a model comprising the steps of:

  • a) collecting cross-section images of a resist profile, wherein each image includes a top surface, a bottom surface and sides of the resist profile;

    b) running said cross-section images through a pattern recognition system; and

    c) capturing resultant data.

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