Method of fabricating a micromachined tube for fluid flow

• US 6,935,010 B2
• Filed: 09/03/2002
• Issued: 08/30/2005
• Est. Priority Date: 12/21/1999
• Status: Expired due to Term

• Current Assignee: Integrated Sensing Systems Incorporated
• Original Assignee: Integrated Sensing Systems Incorporated
• Inventors: Zhang, Yafan, Tadigadapa, Srinivas, Najafi, Nader, Tsai, Chialun
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): THOMPSON, JEWEL VERGIE
• Application Number:
  US10/233,980
• Publication Number:
  US 20030061889A1
• Time in Patent Office: 1,092 Days
• Field of Search: 295/95, 294/24, 298/901, 29/253.5, 295/921, 296/030.7, 296/031.8, 156/598, 156/153, 156/295, 156/644
• US Class Current: 29/592.1
• CPC Class Codes: G01F 1/8404 details of flowmeter manufacturing methods
• CPC Class Codes: G01F 1/8445 micromachined flowmeters
• CPC Class Codes: G01F 1/8472 having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane G01F1/8481 takes precedence
• CPC Class Codes: G01N 11/16 by measuring damping effect upon oscillatory body
• CPC Class Codes: G01N 2009/006 vibrating tube, tuning fork
• CPC Class Codes: G01N 9/002 using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis G01N9/34 takes precedence
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49428 Gas and water specific plumbing component making
• CPC Class Codes: Y10T 29/49995 Shaping one-piece blank by removing material

Abstract

Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus, is used in conjunction with the tube and electrodes in conjunction with a variety of different applications, including fluid flow measurement, fluid density measurement, fluid viscosity measurement, fluid transport, separation and/or mixing. According to a particular embodiment, the free-standing section of the tube is resonated for fluid flow and density measurements according to the Coriolis effect. Capacitive/electrostatic actuation techniques are used to control or resonate the free-standing section of the tube, and to detect variations in tube movement. Different methods of fabricating micromachine fluidic apparatus are also disclosed, including the use of fusion bonding of non-conducting substrates, high-aspect ratio etching techniques, and anisotropic etching and refill techniques, preferably utilizing chevron-shaped slit openings to fabricate microtube sections.

Claims

1. A method of fabricating a micromachined tube for fluid flow, comprising the steps of:

etching a recess in a surface of a first material;

enclosing the recess with a second material to define a tube cavity; and

defining an exterior of the tube by removing at least portions of at least one of the first and second materials, wherein at least one of the first and second materials is a substrate, the tube is on or within the substrate and has a length between a fluid inlet and a fluid outlet port, and a section of the tube is free-standing relative to the substrate as a result of the step of defining the exterior of the tube.

2. The method of claim 1, wherein the first, second, or both materials comprise a doped or undoped silicon wafer with or without an epitaxial layer, or a polished silicon-on-insulator (SOI) substrate.

3. The method of claim 1, wherein the recess is enclosed by joining the first and second materials using anodic bonding, silicon fusion bonding, adhesive bonding, eutectic bonding, thermal compression bonding, compression bonding, or a combination thereof.

4. The method of claim 1, wherein the second material comprises a doped region and an undoped region, and the recess is enclosed by bonding the doped region of the second material to the first material.

5. The method of claim 4, wherein the exterior of the tube is defined by completely removing the undoped region of the second material so that the doped region of the second material defines a portion of the exterior of the tube.

6. The method of claim 5, wherein the exterior of the tube is further defined by removing portions of the doped region of the second material and portions of the first material.

7. The method of claim 5, further comprising the steps of bonding the exterior of the tube to a third material so that the tube is between the first and third materials, and then completely removing an undoped region of the first material.

8. The method of claim 1, further comprising the step of doping the surface of the first material in which the recess was etched to define a doped region overlying an undoped region, the recess being enclosed by bonding the doped region of the first material to the second material, and the doped region of the first material defining a portion of the exterior of the tube following the removing step.

9. The method of claim 1, wherein the first material is a layer on a silicon-on-insulator substrate and the recess is etched in the layer.

10. A method of fabricating a micromachined free-standing tube, comprising the steps of:

defining a plurality of closely spaced slit openings in a first material;

undercutting a plurality of the slit openings to form a continuous channel beneath and connected to the openings; and

enclosing the channel by sealing the slit openings with a second material to form a tube with a continuous tube cavity beneath the first and second materials.

11. The method of claim 10, wherein the first material overlies a substrate and the channel is formed in the substrate during the undercutting step.

12. The method of claim 10, wherein the slit openings are chevron-shaped.

13. The method of claim 11, further comprising the step of removing portions of the substrate so that a section of the tube is free-standing relative to the substrate.

14. The method of claim 11, wherein the step of undercutting the plurality of the slit openings is an etching step that selectively etches a contiguous portion of the substrate beneath the first material and the slit openings.

15. The method of claim 11, further comprising the steps of bonding a second substrate to the first material so as to enclose the tube between the second substrate and the substrate in which the channel was formed, removing the substrate in which the channel was formed, and then bonding a cap to the second substrate so as to enclose the tube between the second substrate and the cap.

16. A method of fabricating a micromachined tube for fluid flow, the method comprising the steps of:

etching a recess in a surface of a first material;

enclosing the recess with a second material to define a tube cavity; and

defining an exterior of the tube by removing at least portions of at least one of the first and second materials;

wherein the first material is a layer on a silicon-on-insulator substrate and the recess is etched in the layer; and

wherein the second material comprises a doped region and an undoped region, end the recess is enclosed by bonding the doped region of the second material to the layer of the first material.

17. The method of claim 16, wherein a portion of the exterior of the tube is defined by completely removing the undoped region of the second material.

18. The method of claim 17, wherein a portion of the exterior of the tube is further defined by removing portions of the doped region of the second material and portions of the layer of the first material.

19. The method of claim 18, further comprising the steps of bonding the doped region of the second material to a third material so that the tube is between the third material and the silicon-on-insulator substrate, and then removing the silicon-on-insulator substrate.