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Hybrid film type sensor

  • US 6,936,147 B2
  • Filed: 11/18/2002
  • Issued: 08/30/2005
  • Est. Priority Date: 11/19/1999
  • Status: Expired due to Fees
First Claim
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1. A sensor cell for detecting gases comprising:

  • a substrate having a first surface and a second surface;

    a sensing electrode;

    said sensing electrode in contact with said substrate;

    an opening extending from said first surface to said second surface proximate to said sensing electrode for controlling a gas flow;

    a gas diffusion membrane in contact with said sensing electrode and placed within said opening and between the gases to be detected and said sensing electrode;

    a thickness of said gas diffusion membrane calculated based upon a parameter selected from the group consisting of a material of said gas diffusion membrane, a difference in partial pressure of the gas across said gas diffusion membrane, a permeability coefficient of said gas diffusion membrane, and combinations thereof; and

    said gas diffusion membrane is a proton exchange membrane.

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