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Wireless MEMS sensing device

  • US 6,936,160 B2
  • Filed: 10/28/2002
  • Issued: 08/30/2005
  • Est. Priority Date: 10/28/2002
  • Status: Expired due to Fees
First Claim
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1. A filter module for filtering a fluid, said filter module comprising:

  • a filter element having an end cap at an end thereof, said filter element receiving said fluid in an unfiltered state at an inlet side and producing said fluid in a filtered state at an outlet side;

    a single-body sensor component coupled to said end cap, said sensor component having a single housing and at least a first sensor package and a second sensor package disposed within said housing, each said sensor package including a micro-electromechanical systems (MEMS) sensor, and each said sensor package being configured to measure at least one member selected from the group consisting of temperature, pressure, and flow rate; and

    a transmitter coupled to said sensor component, said transmitter being configured to wirelessly transmit measurement data to a remote signal receiver, wherein said filter element, said end cap, and said sensor component are adapted to be housed within a casing, and wherein said first sensor package is adapted to be in communication with said unfiltered fluid upstream of said filter element and said second sensor package is adapted to be in communication with said filtered fluid downstream of said filter element.

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