Method of fabricating microelectromechanical systems and devices having trench isolated contacts

• US 6,936,491 B2
• Filed: 06/04/2003
• Issued: 08/30/2005
• Est. Priority Date: 06/04/2003
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Partridge, Aaron, Lutz, Markus, Kronmueller, Silvia
• Primary Examiner(s): NGUYEN, THANH T
• Application Number:
  US10/455,555
• Publication Number:
  US 20040245586A1
• Time in Patent Office: 818 Days
• Field of Search: 438 48- 52
• US Class Current: 438/48
• CPC Class Codes: B81B 2207/015 the micromechanical device and the control or processing electronics being integrated on the same substrate
• CPC Class Codes: B81B 2207/095 through the lid
• CPC Class Codes: B81C 1/00301 Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
• CPC Class Codes: B81C 2201/0176 Chemical vapour Deposition
• CPC Class Codes: B81C 2203/0136 Growing or depositing of a covering layer

Abstract

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging and a contact area disposed at least partially outside the chamber. The contact area is electrically isolated from nearby electrically conducting regions by way of dielectric isolation trench that is disposed around the contact area. The material that encapsulates the mechanical structures, when deposited, includes one or more of the following attributes: low tensile stress, good step coverage, maintains its integrity when subjected to subsequent processing, does not significantly and/or adversely impact the performance characteristics of the mechanical structures in the chamber (if coated with the material during deposition), and/or facilitates integration with high-performance integrated circuits. In one embodiment, the material that encapsulates the mechanical structures is, for example, silicon (polycrystalline, amorphous or porous, whether doped or undoped), silicon carbide, silicon-germanium, germanium, or gallium-arsenide.

Claims

1. A method of sealing a chamber of a microelectromechanical device having a micromechanical structure and a contact wherein the micromechanical structure is in a chamber, the method comprising:

depositing a sacrificial layer over at least a portion of the micromechanical structure;

depositing a first encapsulation layer over the sacrificial layer;

forming at least one vent through the first encapsulation layer to allow removal of at least a portion of the sacrificial layer;

removing at least a portion of the sacrificial layer to form the chamber;

depositing a second encapsulation layer over or in the vent to seal the chamber wherein the second encapsulation layer is a semiconductor material;

forming a trench around at least a portion of the contact which is disposed outside the chamber; and

depositing an insulating material in the trench to electrically isolate the contact.

2. The method of claim 1 wherein the semiconductor material includes polycrystalline silicon, porous polycrystalline silicon. amorphous silicon, silicon carbide, silicon/germanium, germanium, or gallium arsenide.

3. The method of claim 2 wherein the first encapsulation layer includes polycrystalline silicon, porous polycrystalline silicon, amorphous silicon, germanium, silicon/germanium or gallium arsenide.

4. The method of claim 1 wherein the trench surrounds the contact to electrically isolate the contact.

5. The method of claim 1 further including depositing a semiconductor material in the trench after depositing the insulating material.

6. The method of claim 1 further including planarizing an exposed surface of the trench.

7. The method of claim 1 wherein the insulating material is silicon dioxide or silicon nitride.

8. The method of claim 1 further including:

depositing an insulating layer on at least a portion of the trench;

depositing an highly conductive material on the contact and over the insulating layer.

17. The method of claim 1 wherein depositing an insulating material in the trench further includes depositing the insulating material substantially throughout the trench.

9. A method of manufacturing a microelectromechanical device having a micromechanical structure that resides in a chamber and wherein the microelectromechanical device further includes a contact, the method comprising:

depositing a first encapsulation layer over the micromechanical structure wherein the first encapsulation layer is a semiconductor material;

forming at least one vent in the first encapsulation layer;

forming the chamber;

depositing a second encapsulation layer over or in the vent to seal the chamber wherein the second encapsulation layer is a semiconductor material;

forming a trench around at least a portion of the contact wherein the trench and at least the portion of the contact are disposed outside the chamber; and

depositing a first material in the trench to electrically isolate the contact.

10. The method of claim 9 wherein the first encapsulation layer includes polycrystalline silicon, porous polycrystalline silicon, amorphous silicon, silicon carbide, silicon/germanium, germanium, or gallium arsenide.

11. The method of claim 9 wherein the first material is silicon dioxide or silicon nitride.

12. The method of claim 9 wherein the second encapsulation layer includes polycrystalline silicon, porous polycrystalline silicon, amorphous silicon, silicon carbide, silicon/germanium, germanium, or gallium arsenide.

13. The method of claim 9 wherein the trench surrounds the contact to electrically isolate the contact.

14. The method of claim 9 further including depositing a semiconductor material in the trench after depositing the first material and wherein the first material is disposed on the outer surfaces of the trench.

15. The method of claim 14 further including planarizing an exposed surface of the trench.

16. The method of claim 9 further including:

depositing an insulating layer on at least a portion of the trench;

depositing an highly conductive material on the contact and over the insulating layer.

18. The method of claim 9 wherein depositing a first material in the trench further includes depositing the first material substantially throughout the trench.

19. A method of manufacturing an microelectromechanical device having a micromechanical structure that resides in a chamber, wherein the microelectromechanical device further includes a contact, the method comprising:

depositing a first encapsulation layer over the micromechanical structure;

depositing a second encapsulation layer on the first encapsulation layer and on the contact, wherein the second encapsulation layer is a semiconductor material;

forming a trench around at least a portion of the contact which is disposed outside the chamber;

depositing an insulating material in the trench, and on at least a first surface of the contact, and over the second encapsulation layer;

removing at least a portion of the insulating material that is disposed on the first surface of the contact to thereby expose a portion of the first surface of the contact; and

depositing a conductive material on the exposed portion of the first surface of the contact.

20. The method of claim 19 wherein the first encapsulation layer includes polycrystalline silicon, porous polycrystalline silicon, amorphous silicon, silicon carbide, silicon/germanium, germanium, or gallium arsenide.

21. The method of claim 20 wherein the insulating material includes silicon dioxide or silicon nitride.

22. The method of claim 20 wherein the trench surrounds the contact to electrically isolate the contact from the second encapsulation layer.

23. The method of claim 20 further including depositing a semiconductor material in the trench after depositing the insulating material and wherein the insulating material is disposed on the outer surfaces of the trench.

24. The method of claim 19 wherein forming a trench around at least a portion of the contact further includes anisotropically etching, through the first and second encapsulation layers, to an insulating material.

25. The method of claim 19 further including forming the chamber, wherein forming the chamber includes:

depositing a sacrificial layer over at least a portion of the micromechanical structure;

depositing the first encapsulation layer over the sacrificial layer; and

removing at least a portion of the sacrificial layer.

26. The method of claim 25 wherein forming the chamber further includes:

forming at least one vent through the first encapsulation layer to allow removal of at least the portion of the sacrificial layer; and

depositing the second encapsulation layer over or in the vent to seal the chamber.

27. The method of claim 19 wherein depositing an insulating material in the trench further includes depositing the insulating material substantially throughout the trench.