Single proof mass, 3 axis MEMS transducer
First Claim
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1. A method for making a transducer, comprising:
- providing a substrate;
depositing a first conductive layer on said substrate;
patterning said first conductive layer to define first and second capacitive structures therein;
depositing a sacrificial layer over said first conductive layer;
depositing a second conductive layer over the sacrificial layer; and
patterning the second conductive layer to define a proof mass and sense fingers therein such that the center of mass of the proof mass is asymmetrically disposed relative to said first and second capacitive structures.
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Abstract
A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
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Citations
14 Claims
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1. A method for making a transducer, comprising:
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providing a substrate; depositing a first conductive layer on said substrate; patterning said first conductive layer to define first and second capacitive structures therein; depositing a sacrificial layer over said first conductive layer; depositing a second conductive layer over the sacrificial layer; and patterning the second conductive layer to define a proof mass and sense fingers therein such that the center of mass of the proof mass is asymmetrically disposed relative to said first and second capacitive structures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification