Bulk resonator
First Claim
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1. A resonator comprising:
- a first layer of dielectric;
a second layer of silicon formed on said first layer of dielectric;
a third layer of a piezoelectric material formed on a first portion of said second layer;
a fourth layer of amorphous material formed on said third layer or the bottom of said first layer of dielectric;
a fifth layer formed on a second portion of said second layer;
a first contact layer formed on said fourth and fifth layers; and
a second contact formed on a third portion of said second layer.
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Abstract
A resonator having temperature and electronic compensation. The resonator has several layers on a substrate having opposite thermal coefficients of the sound velocity for temperature compensation. Also, the frequency of the resonator is adjusted in accordance with an external time reference. The resonator has a high quality factor and a very small size.
92 Citations
44 Claims
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1. A resonator comprising:
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a first layer of dielectric;
a second layer of silicon formed on said first layer of dielectric;
a third layer of a piezoelectric material formed on a first portion of said second layer;
a fourth layer of amorphous material formed on said third layer or the bottom of said first layer of dielectric;
a fifth layer formed on a second portion of said second layer;
a first contact layer formed on said fourth and fifth layers; and
a second contact formed on a third portion of said second layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A resonator comprising:
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a first layer of dielectric material;
a second layer of the first material on said first layer;
a third layer of piezoelectric material on said second layer; and
a fourth layer of amorphous material on said third layer. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 44)
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23. A resonator comprising:
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means for resonating;
means for attaining a first count of a frequency of said means for resonating during a time reference period;
means for attaining a second count of a predetermining frequency during the time reference period; and
means for changing the frequency of said means for resonating so that the first count is approximately equal to the second count. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A resonator comprising:
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a support structure;
a first layer, having dielectric material, on said support structure;
a second layer, having a first material, on said first layer;
a third layer, having conductive material, on a portion of said second layer;
a fourth layer, having piezoelectric material, on a second portion of said second layer; and
a fifth layer, having amorphous material, on said fourth layer. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43)
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Specification