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Probe card assembly for contacting a device with raised contact elements

  • US 6,937,037 B2
  • Filed: 07/16/2002
  • Issued: 08/30/2005
  • Est. Priority Date: 11/09/1995
  • Status: Expired due to Fees
First Claim
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1. A probe card assembly comprising:

  • a probe card comprising a plurality of electrical contacts;

    a probe substrate having a plurality of contact pads positioned for contacting raised contact elements of a device to be probed;

    a second substrate disposed between and spaced from the probe card and the probe substrate; and

    a plurality of elongate, resilient interconnection elements providing resilient electrical connections through the second substrate between the probe card and the probe substrate and thereby electrically connecting ones of the electrical contacts with ones of the contact pads.

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