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Thermal bend actuator with spatial thermal pattern

  • US 6,938,991 B2
  • Filed: 07/06/2004
  • Issued: 09/06/2005
  • Est. Priority Date: 10/16/1998
  • Status: Expired due to Fees
First Claim
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1. A thermal actuator for a micro-electromechanical device comprising:

  • (a) a base element;

    (b) a cantilevered element including a thermo-mechanical bender portion extending from the base element and a free end tip residing in a first position, the thermo-mechanical bender portion having a base end adjacent the base element and a free end adjacent the free end tip; and

    (c) apparatus adapted to apply a heat pulse having a spatial thermal pattern directly to the thermo-mechanical bender portion, causing the deflection of the free end tip of the cantilevered element to a second position, and wherein said spatial thermal pattern results in a substantially greater temperature increase of the base end than the free end of the thermo-mechanical bender portion.

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