Semiconductor device with inductive component and method of making
First Claim
Patent Images
1. A method of making an integrated circuit, comprising the steps of:
- forming a dielectric region in a top surface of a semiconductor substrate, where the dielectric region has a cavity;
etching a second surface of the semiconductor substrate to form a recessed region under the dielectric region;
etching the dielectric region to form a trench adjacent to the cavity;
depositing a barrier material to form an etch stop on a bottom surface of the trench; and
disposing a conductive material in the trench to form an inductor.
1 Assignment
0 Petitions
Accused Products
Abstract
An integrated circuit (10) includes a semiconductor substrate (11) that has a top surface (32) for forming a dielectric region (14) with a trench (40) and one or more adjacent cavities (16). A conductive material such as copper is disposed within the trench to produce an inductor (50). A top surface (49) of the inductor is substantially coplanar with an interconnect surface (31) of the semiconductor substrate, which facilitates connecting to the inductor with standard integrated circuit metallization (57).
24 Citations
7 Claims
-
1. A method of making an integrated circuit, comprising the steps of:
-
forming a dielectric region in a top surface of a semiconductor substrate, where the dielectric region has a cavity;
etching a second surface of the semiconductor substrate to form a recessed region under the dielectric region;
etching the dielectric region to form a trench adjacent to the cavity;
depositing a barrier material to form an etch stop on a bottom surface of the trench; and
disposing a conductive material in the trench to form an inductor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
Specification