Giant magnetoresistance based nanopositioner encoder
First Claim
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1. An encoder (10) for determining position comprising:
- a magnetic element (16) producing a magnetic field;
a mass (12) to move along a path and passing through said magnetic field;
a nanopositioner (24) operatively connected to said mass (12) for moving said mass (12);
a giant magnetoresistor (GMR) (14) operatively connected to said mass (12) for changing in electrical resistance in response to changes in said magnetic field produced by said magnetic element (16);
a voltage sensor (20) operatively connected to said GMR (14) for sensing a voltage across said GMR (14);
said magnetic element (16) including a strip of magnetic bits (18) providing discrete magnetic field regions disposed linearly relative to one another along said path; and
said mass (12) and said magnetic bits (18) being supported for movement relative to one another along said path to produce digital signals from said voltage sensor (20).
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Abstract
An encoder (10) for a nanopostioner (24) includes a strip of magnetic bits (18) for producing discrete magnetic fields and a giant magnetoresistor (GMR) (14) which changes in electrical resistance in response to changes in the magnetic fields. The GMR (14) is connected to a mass (12) which moves along a path proximate to the strip of magnetic bits (18). A voltage sensor (20) is connected to the GMR (14) to produce digital signals based on the changes in electrical resistance of the GMR (14). A processor (22) calculates the position of the nanopositioner (24) based on the digital signals.
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2 Claims
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1. An encoder (10) for determining position comprising:
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a magnetic element (16) producing a magnetic field;
a mass (12) to move along a path and passing through said magnetic field;
a nanopositioner (24) operatively connected to said mass (12) for moving said mass (12);
a giant magnetoresistor (GMR) (14) operatively connected to said mass (12) for changing in electrical resistance in response to changes in said magnetic field produced by said magnetic element (16);
a voltage sensor (20) operatively connected to said GMR (14) for sensing a voltage across said GMR (14);
said magnetic element (16) including a strip of magnetic bits (18) providing discrete magnetic field regions disposed linearly relative to one another along said path; and
said mass (12) and said magnetic bits (18) being supported for movement relative to one another along said path to produce digital signals from said voltage sensor (20). - View Dependent Claims (2)
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Specification