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Giant magnetoresistance based nanopositioner encoder

  • US 6,940,277 B2
  • Filed: 08/28/2003
  • Issued: 09/06/2005
  • Est. Priority Date: 11/17/2000
  • Status: Expired due to Term
First Claim
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1. An encoder (10) for determining position comprising:

  • a magnetic element (16) producing a magnetic field;

    a mass (12) to move along a path and passing through said magnetic field;

    a nanopositioner (24) operatively connected to said mass (12) for moving said mass (12);

    a giant magnetoresistor (GMR) (14) operatively connected to said mass (12) for changing in electrical resistance in response to changes in said magnetic field produced by said magnetic element (16);

    a voltage sensor (20) operatively connected to said GMR (14) for sensing a voltage across said GMR (14);

    said magnetic element (16) including a strip of magnetic bits (18) providing discrete magnetic field regions disposed linearly relative to one another along said path; and

    said mass (12) and said magnetic bits (18) being supported for movement relative to one another along said path to produce digital signals from said voltage sensor (20).

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