Vertical displacement device

• US 6,940,630 B2
• Filed: 04/29/2004
• Issued: 09/06/2005
• Est. Priority Date: 05/01/2003
• Status: Expired due to Fees

• Current Assignee: University of Florida Research Foundation, Incorporated (State University System of Florida)
• Original Assignee: University of Florida Research Foundation, Incorporated (State University System of Florida)
• Inventors: Xie, Huikai
• Primary Examiner(s): Lee, Andrew H.
• Application Number:
  US10/835,344
• Publication Number:
  US 20040218877A1
• Time in Patent Office: 495 Days
• Field of Search: 359/237, 359/290, 359/291, 359/254, 359/298
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/038 Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
• CPC Class Codes: B81B 2201/06 Bio-MEMS
• CPC Class Codes: B81B 3/0018 Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3526 the optical element being a lens
• CPC Class Codes: G02B 6/3534 the optical element being diffractive, i.e. a grating
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.

Claims

1. A MEMS vertical displacement device, comprising:

an anchor;

at first frame rotatable about the anchor and having a first side and a second side opposing the first side;

at least one first actuator coupled to the first side of the first frame and to the anchor enabling the first frame to rotate about the anchor;

at least one vertically displaceable platform rotatable about the second side of the first frame; and

at least one second actuator coupled to the second side of the first frame and to the at least one vertically displaceable platform enabling the at least one vertically displaceable platform to rotate about the second side of the first frame.

2. The MEMS vertical displacement device of claim 1, wherein the at least one first actuator is a thermal actuator.

3. The MEMS vertical displacement device of claim 2, wherein the at least one second actuator is a thermal actuator.

4. The MEMS vertical displacement device of claim 2, wherein the thermal actuator is formed from at least two layers of different material having different coefficients of thermal expansion.

5. The MEMS vertical displacement device of claim 4, further comprising a third material encapsulated in at least one of the materials that functions as a heating element.

6. The MEMS vertical displacement device of claim 1, further comprising at least one extension arm coupled to the first frame and to the vertical displacement device for increasing the amount of vertical displacement of the vertically displaceable platform.

7. The MEMS vertical displacement device of claim 1, wherein the vertically displaceable platform is a microlens.

8. The MEMS vertical displacement device of claim 1, wherein the vertically displaceable platform is a micromirror.

9. The MEMS vertical displacement device of claim 1, wherein the vertically displaceable platform is micro-grating.

10. The MEMS vertical displacement device of claim 1, further comprising a second frame rotatably coupled to the first frame using the at least one second actuator and a third frame coupled to the second frame using a third actuator, wherein the second frame fits inside the first frame and the third frame fits inside the second frame while the vertical displacement device is not actuated.

11. The MEMS vertical displacement device of claim 10, wherein the third frame is coupled to the second frame at a side generally orthogonal to the side to which the second frame is attached to the first frame.

12. The MEMS vertical displacement device of claim 11, wherein the vertically displaceable platform is coupled to a side of the third frame that is generally opposite to the side to which the third frame is attached to the second frame.

13. The MEMS vertical displacement device of claim 12, wherein the vertically displaceable platform is a microlens and is capable of being used to perform 2D scanning.

14. The MEMS vertical displacement device of claim 12, wherein the vertically displaceable platform is a micromirror and is capable of being used to perform 2D scanning.

15. The MEMS vertical displacement device of claim 12, wherein the vertically displaceable platform is micro-grating and is capable of being used to perform 2D scanning.