×

Angular velocity sensor

  • US 6,941,810 B2
  • Filed: 12/05/2002
  • Issued: 09/13/2005
  • Est. Priority Date: 03/30/1993
  • Status: Expired due to Fees
First Claim
Patent Images

1. An angular velocity sensor for detecting an angular velocity component comprising:

  • an oscillator made of a substrate with thickness enough to obtain a mass sufficient to provide the sensor with a required sensitivity;

    a sensor casing for accommodating the oscillator therewithin;

    a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing;

    an electrical driving device for oscillating the oscillator using electrical energy, the electrical driving device including a first electrode provided on a surface of the oscillator, a second electrode provided on a surface of a fixed member fixed to the sensor casing and an excitation element applying a voltage between the first electrode and the second electrode; and

    a capacitance element including a pair of electrodes, a distance between the pair of electrodes being changed based on a deviation of the oscillator caused by Coriolis force.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×