Hydrophobically coated pressure sensor
First Claim
1. Pressure sensor for measuring the difference between a pressure being measured and an ambient pressure, comprising:
- a sensor chamber; and
a deformation body, exposed to a medium under the pressure to be measured, and which additionally seals said sensor chamber, at least on part of the cavity thereof, pressure-tightly from the medium, wherein;
the walls of said sensor chamber have a hydrophobic coating, said hydrophobic coating is applied by gas and/or vapor phase deposition, and said sensor chamber has a chamber opening, through which it can be exposed to a reference pressure, and the gas and/or vapor phase deposition occurred through the chamber opening.
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Accused Products
Abstract
A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.
17 Citations
17 Claims
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1. Pressure sensor for measuring the difference between a pressure being measured and an ambient pressure, comprising:
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a sensor chamber; and
a deformation body, exposed to a medium under the pressure to be measured, and which additionally seals said sensor chamber, at least on part of the cavity thereof, pressure-tightly from the medium, wherein;
the walls of said sensor chamber have a hydrophobic coating, said hydrophobic coating is applied by gas and/or vapor phase deposition, and said sensor chamber has a chamber opening, through which it can be exposed to a reference pressure, and the gas and/or vapor phase deposition occurred through the chamber opening. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for coating a pressure sensor with a hydrophobic material, comprising the steps of:
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placing the sensor in a chamber;
evacuating the chamber; and
providing at least one coating gas and/or vapor phase, wherein;
the temperature of the pressure sensor Ts is such that molecules can adsorb from the coating gas and/or vapor phase onto the pressure sensor;
said at least on coating includes coating coating the walls of a pressure chamber inside the pressure sensor, which occurs through an opening in the pressure chamber;
additionally, the chamber is evacuated following the providing of the at least one coating gas and/or vapor phase, and/or the chamber is flushed with a second gas following said at least one coating gas and/or vapor phase, and the temperature Ts of the pressure sensor is subsequently increased, in order to effect a modification or chemical bonding of the adsorbed material. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification