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Hybrid pneumatic-magnetic isolator-actuator

  • US 6,942,202 B2
  • Filed: 11/21/2003
  • Issued: 09/13/2005
  • Est. Priority Date: 02/20/2002
  • Status: Expired due to Fees
First Claim
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1. A vibration isolation, position actuation device comprising:

  • a pneumatic actuator, a pressure servo-valve, a gas pressure supply, a coil and magnet, a state variable sensor, and a control unit wherein the pneumatic actuator is further comprised of a carriage and a housing wherein the carriage is constrained to move within the housing upon a gas film, wherein the pressure servo-valve accepts an input command signal and modulates the gas pressure supply which is applied to the pneumatic actuator, wherein the state variable sensor measures a state variable of the pneumatic actuator resulting from the applied modulated gas pressure supply, wherein the control unit determines the error existing in the measured state variable relative to the command signal, and wherein the control unit modulates electrical current applied to the coil such that a magnetic force is effected between the coil and magnet, wherein the magnetic force is directly applied to the carriage of the pneumatic actuator by the magnet without intervening mechanical means, in such proportion to negate the measured error in the state variable of the pneumatic actuator.

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