Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication

• US 6,942,750 B2
• Filed: 06/05/2002
• Issued: 09/13/2005
• Est. Priority Date: 06/08/2001
• Status: Expired due to Fees

• Current Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Original Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Inventors: Chou, Tsung-Kuan A., Najafi, Khalil, Bernal, Luis P., Washabaugh, Peter D.
• Primary Examiner(s): Haran, John T.
• Application Number:
  US10/163,082
• Publication Number:
  US 20020195673A1
• Time in Patent Office: 1,196 Days
• Field of Search: 156/272.2, 156/275.5, 156/275.7, 156/290, 156/292, 156/330, 438/455, 438/456, 438/689, 438/745, 438/753
• US Class Current: 156/272.2
• CPC Class Codes: B81B 2203/0323 Grooves
• CPC Class Codes: B81B 7/0051 between the package lid and the substrate
• CPC Class Codes: B81C 2203/0118 Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
• CPC Class Codes: B81C 2203/019 characterised by the material or arrangement of seals between parts
• CPC Class Codes: B81C 2203/032 Gluing
• CPC Class Codes: B81C 3/001 Bonding of two components

Abstract

A method of low-temperature (150-300° C.) patterned wafer bonding of complex 3D MEMS comprising providing a first pre-processed wafer having a first surface and a second pre-processed wafer having a second surface. Photosensitive benzocyclobutene (BCB) polymer is then applied to the first surface of the first wafer in a predetermined pattern to define a bonding layer. The second wafer is then bonded to the first wafer only along the bonding layer.

Claims

1. A method of low-temperature bonding an apparatus, said method comprising:

providing a first substrate having a first surface, said first surface having a first portion of a MEMS device formed thereon;

providing a second substrate having a second surface, said second surface having a second portion of said MEMS device formed thereon;

applying photosensitive benzocyclobutene to said first surface of said first substrate in a predetermined pattern to define a bonding layer, an area of said bonding layer being less than an area of said first surface;

positioning said second substrate in contact with said bonding layer on said first substrate to create a bond between said first substrate and said second substrate at said bonding layer at a temperature between about 50°

C. and about 300°

C. to form a bonded unit, said positioning of said second substrate in contact with said first substrate further joins said first portion of said MEMS device to said second portion of said MEMS device; and

etching said bonded unit to further form said MEMS device.

2. The method according to claim 1 wherein said applying photosensitive benzocyclobutene to said first surface of said first substrate in said predetermined pattern to define said bonding layer comprises:

applying said photosensitive benzocyclobutene to said first substrate;

exposing at least a portion of said photosensitive benzocyclobutene to a predetermined wavelength of light; and

removing the remaining unexposed portion of said photosensitive benzocyclobutene to define said bonding layer.

3. The method according to claim 2, further comprising:

applying an adhesion promoter to said first substrate prior to said applying photosensitive benzocyclobutene to said first substrate to enhance said bond between said first substrate and said second substrate.

4. The method according to claim 2, further comprising:

baking said photosensitive benzocyclobutene on said first substrate prior to said exposing at least a portion of said photosensitive benzocyclobutene to said predetermined wavelength of light.

5. The method according to claim 2, further comprising:

baking said photosensitive benzocyclobutene on said first substrate following the said exposing at least a portion of said photosensitive benzocyclobutene to said predetermined wavelength of light to produce a reliable molecular cross-link at said bonding layer.

6. The method according to claim 2 wherein said applying photosensitive benzocyclobutene to said first substrate includes spinning said photosensitive benzocyclobutene upon said first substrate at a predetermined spin rate to achieve a predetermined thickness of said bonding layer.

7. The method according to claim 1 wherein said first substrate is a boron-doped silicon and said providing said first substrate having said first surface, said first surface having said first portion of said MEMS device formed thereon comprises:

deep reactive ion etching a plurality of perforations through said first surface of said first substrate; and

wet tetramethyl ammonium hydroxide anisotropic etching said first substrate below said plurality of perforations to produce a generally uniform cavity within said first substrate such that said first surface layer generally spans said cavity and defines said first portion of said MEMS device.

8. The method according to claim 1 wherein said applying photosensitive benzocyclobutene to said first surface of said first substrate in said predetermined pattern to define said bonding layer comprises:

providing a stencil mask having an opening, a shape of said opening corresponding to said predetermined pattern;

positioning said stencil mask adjacent said first surface of said first substrate; and

applying photosensitive benzocyclobutene to said first surface of said first substrate through said opening of said stencil mask such that said photosensitive benzocyclobutene defines said bonding layer.

9. The method according to claim 1 wherein said second substrate is a boron-doped silicon and said providing said second substrate having said second surface, said second surface having said second portion of said MEMS device formed thereon comprises:

thermally oxidizing said second substrate to form a silicon dioxide layer;

depositing a silicon nitride layer, an oxide layer and a polycrystalline silicon layer upon said second substrate;

boron doping said polycrystalline silicon layer to provide electrical conductivity; and

etching said least one of said silicon nitride layer, said oxide layer, and said polycrystalline silicon layer to define said second portion of said MEMS device.

10. A method of low-temperature bonding an apparatus, said method comprising:

providing a first substrate having a first surface, said first surface having a first portion of a MEMS device formed thereon;

providing a second substrate having a second surface, said second surface having a second portion of said MEMS device formed thereon;

applying photosensitive benzocyclobutene to said first surface of said first substrate in a predetermined pattern to define a bonding layer, an area of said bonding layer being less than an area of said first surface;

positioning said second substrate in contact with said bonding layer on said first substrate to create a bond between said first substrate and said second substrate at said bonding layer at a temperature between about 150°

C. and about 300°

C. to form a bonded unit, said positioning of said second substrate in contact with said first substrate further joins said first portion of said MEMS device to said second portion of said MEMS device; and

deep reactive ion etching said bonded unit to further form said MEMS device.

11. The method according to claim 10 wherein said applying photosensitive benzocyclobutene to said first surface of said first substrate in said predetermined pattern to define said bonding layer comprises:

applying said photosensitive benzocyclobutene to said first substrate;

exposing at least a portion of said photosensitive benzocyclobutene to a predetermined wavelength of light; and

removing the remaining unexposed portion of said photosensitive benzocyclobutene to define said bonding layer.

12. The method according to claim 11, further comprising:

applying an adhesion promoter to said first substrate prior to said applying photosensitive benzocyclobutene to said first substrate to enhance said bond between said first substrate and said second substrate.

13. The method according to claim 11, further comprising:

baking said photosensitive benzocyclobutene on said first substrate prior to said exposing at least a portion of said photosensitive benzocyclobutene to said predetermined wavelength of light.

14. The method according to claim 11, further comprising:

baking said photosensitive benzocyclobutene on said first substrate following the said exposing at least a portion of said photosensitive benzocyclobutene to said predetermined wavelength of light to produce a reliable molecular cross-link at said bonding layer.

15. The method according to claim 11 wherein said applying photosensitive benzocyclobutene to said first substrate includes spinning said photosensitive benzocyclobutene upon said first substrate at a predetermined spin rate to achieve a predetermined thickness of said bonding layer.

16. The method according to claim 10 wherein said first substrate is a boron-doped silicon and said providing said first substrate having said first surface, said first surface having said first portion of said MEMS device formed thereon comprises:

providing said first substrate;

deep reactive ion etching a plurality of perforations through said first surface of said first substrate; and

wet tetramethyl ammonium hydroxide anisotropic etching said first substrate below said plurality of perforations to produce a generally uniform cavity within said first substrate such that said first surface layer generally spans said cavity and defines said first portion of said MEMS device.

17. The method according to claim 10 wherein said applying photosensitive benzocyclobutene to said first surface of said first substrate in said predetermined pattern to define said bonding layer comprises:

providing a stencil mask having an opening, a shape of said opening corresponding to said predetermined pattern;

positioning said stencil mask adjacent said first surface of said first substrate; and

applying photosensitive benzocyclobutene to said first surface of said first substrate through said opening of said stencil mask such that said photosensitive benzocyclobutene defines said bonding layer.

18. The method according to claim 10 wherein said second substrate is a boron-doped silicon and said providing said second substrate having said second surface, said second surface having said second portion of said MEMS device formed thereon comprises:

thermally oxidizing said second substrate to form a silicon dioxide layer;

depositing a silicon nitride layer, an oxide layer and a polycrystalline silicon layer upon said second substrate;

boron doping said polycrystalline silicon layer to provide electrical conductivity; and

etching said least one of said silicon nitride layer, said oxide layer, and said polycrystalline silicon layer to define said second portion of said MEMS device.