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Radiation-curable anti-reflective coating system

  • US 6,942,924 B2
  • Filed: 10/31/2001
  • Issued: 09/13/2005
  • Est. Priority Date: 10/31/2001
  • Status: Expired due to Fees
First Claim
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1. An apparatus comprising:

  • a substrate; and

    a coating composition on a surface of the substrate comprising a plurality of deposited layers, at least one of the plurality of deposited layers comprising a colloid of plurality of dispersed crystalline metal particles and a condensation product of an organosilane; and

    at least one of the plurality of layers comprises a radiation curable material.

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