Laser annealing apparatus, TFT device and annealing method of the same
First Claim
1. A laser annealing apparatus comprising:
- a laser beam source to emit a laser beam;
a variable transmittance filter passing the laser beam therethrough and variably adjusting a transmittance thereof to a desired value;
a modulation device modulating an amplitude of the laser beam in terms of time;
a energy distribution adjuster device adjusting an energy distribution in a cross-section of the laser beam; and
a projecting optical system projecting the laser beam which has passed through the variable transmittance filter, the modulation device and the energy distribution adjuster device onto a surface of a sample.
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Accused Products
Abstract
A laser beam is concentrated using an objective lens and radiated on a amorphous silicon film or polycrystalline silicon film having a grain size of one micron or less, the laser beam being processed from a continuous wave laser beam (1) to be pulsed using an EO modulator and to have arbitrary temporal energy change while pulsing ; (2) to have an arbitrary spatial energy distribution using a beam-homogenizer, filter having an arbitrary transmittance distribution, and rectangular slit; and (3) to eliminate coherency thereof using a high-speed rotating diffuser. In this manner, it is possible to realize a liquid crystal display device in which a driving circuit comprising a polycrystalline silicon film having substantially the same properties as a single crystal is incorporated in a TFT panel device.
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Citations
32 Claims
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1. A laser annealing apparatus comprising:
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a laser beam source to emit a laser beam;
a variable transmittance filter passing the laser beam therethrough and variably adjusting a transmittance thereof to a desired value;
a modulation device modulating an amplitude of the laser beam in terms of time;
a energy distribution adjuster device adjusting an energy distribution in a cross-section of the laser beam; and
a projecting optical system projecting the laser beam which has passed through the variable transmittance filter, the modulation device and the energy distribution adjuster device onto a surface of a sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 14)
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12. A laser annealing apparatus comprising:
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a stage that is movable in a state supporting a sample;
a laser beam source emitting a laser beam;
a variable transmittance filter passing the laser beam therethrough and adjusting a transmittance thereof to a desired value;
a modulation device modulating an amplitude of the laser beam in terms of time;
a shaping device to shape a cross-sectional form of the laser beam;
a coherency reducing device to reduce a coherency of the laser beam; and
a projecting optical system projecting the laser beam which has passed through the variable transmittance filter, the modulation device, the shaping device and the coherency reducing device onto a surface of the sample. - View Dependent Claims (13, 15, 16, 17, 18)
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19. A laser annealing apparatus comprising:
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a stage that is movable in a state supporting a sample;
a laser beam source emitting a laser beam;
a variable transmittance filter passing the laser beam therethrough and adjusting a transmittance thereof to a desired value;
a shutter selectively passing the laser beam emitted through the variable transmittance filter;
a modulation device modulating in terms of time an amplitude of the laser beam which has passed through the shutter within a time period when the shutter is open;
an energy distribution adjuster device adjusting the laser beam to have a desired spatial energy distribution;
a coherency reducing device to reduce a coherency of the laser beam; and
a projecting optical system to effect projection of the laser beam which has passed through the variable transmittance filter, the shutter, the modulation device, the energy distribution adjuster device and the coherency reducing device onto a surface of the sample. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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26. A laser annealing apparatus comprising:
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a stage that is movable in a state supporting a sample;
a laser beam source emitting a laser beam;
a variable transmittance filter passing the laser beam therethrough and adjusting a transmittance thereof to a desired value;
a shutter selectively passing the laser beam emitted through the variable transmittance;
a modulation device to modulating an amplitude of the laser beam which has passed through the shutter in terms of time;
an energy distribution adjuster device adjusting a spatial energy distribution of the laser beam; and
a projecting optical system to effect projection of the laser beam which has passed through the variable transmittance filter, the shutter, the modulation device and the energy distribution adjuster device onto a surface of the sample. - View Dependent Claims (27, 28, 29, 30, 31, 32)
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Specification