Semiconductor bidirectional switching device
First Claim
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1. A bidirectional switch, comprising:
- a semiconductor substrate having a first surface for forming a trench;
a control structure formed in the trench to enable a conduction channel in response to a control signal, and having a dielectric layer along a wall of the trench and a control electrode adjacent to the dielectric layer, wherein the dielectric layer extends onto the first surface, and wherein the dielectric layer has a first thickness along the wall, and wherein the dielectric layer has a second thickness along the first surface, wherein the second thickness is greater than the first thickness, and wherein the control electrode extends above the first surface;
a first conduction electrode having a first layer formed at the first surface for receiving a current and a second layer underlying the first layer for coupling the current to the conduction channel, wherein the first layer is spaced a predefined distance from the control electrode; and
a second conduction electrode disposed at a lower portion of the trench for receiving the current from the conduction channel.
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Abstract
A semiconductor switching device (10) is formed on a semiconductor substrate (12) having a trench (44) formed on one of its surfaces (42). A control electrode (32) activates a wall of the trench to form a conduction channel (36). A first conduction electrode (40) is disposed on the semiconductor substrate to have a first doped region (34) for receiving a current and a second doped region (24) for routing the current to the conduction channel.
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Citations
11 Claims
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1. A bidirectional switch, comprising:
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a semiconductor substrate having a first surface for forming a trench;
a control structure formed in the trench to enable a conduction channel in response to a control signal, and having a dielectric layer along a wall of the trench and a control electrode adjacent to the dielectric layer, wherein the dielectric layer extends onto the first surface, and wherein the dielectric layer has a first thickness along the wall, and wherein the dielectric layer has a second thickness along the first surface, wherein the second thickness is greater than the first thickness, and wherein the control electrode extends above the first surface;
a first conduction electrode having a first layer formed at the first surface for receiving a current and a second layer underlying the first layer for coupling the current to the conduction channel, wherein the first layer is spaced a predefined distance from the control electrode; and
a second conduction electrode disposed at a lower portion of the trench for receiving the current from the conduction channel. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A bidirectional switch, comprising:
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a semiconductor substrate having a first surface for forming a trench;
a control structure formed in the trench to enable a conduction channel in response to a control signal, and having a dielectric layer along a wall of the trench and a control electrode adjacent to the dielectric layer;
a first conduction electrode having a first layer formed at the first surface for receiving a current and a second layer underlying the first layer for coupling the current to the conduction channel, wherein the first layer is spaced apart from the trench and spaced a predefined distance from the control structure; and
a second conduction electrode disposed at a lower portion of the trench for receiving the current from the conduction channel. - View Dependent Claims (8, 9, 10, 11)
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Specification