Multiple local probe measuring device and method
First Claim
1. A local probe measuring device for effecting local measurements referring to a sample, comprising:
- a first local probe for local measurements with respect to a sample or a reference surface, a second local probe for local measurements with respect to the sample or the reference surface, a rigid mechanical coupling between the first local probe and the second local probe, a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust a first measurement condition of the first local probe with respect to the sample or the reference surface and a second measurement condition of the second local probe with respect to the sample or the reference surface, a detection arrangement comprising a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements effected by said first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by said second local probe, characterized in that more than two local probes are provided for local measurements with respect to the sample or the reference surface, which are rigidly mechanically coupled with each other and are commonly adjustable by the positioning arrangement.
0 Assignments
0 Petitions
Accused Products
Abstract
The invention provides a local probe measuring device for effecting local measurements referring to a sample, having a first local probe for local measurements with respect to a sample, a second local probe for local measurements with respect to the sample, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first local probe with respect to the sample and a second measurement condition of the second local probe with respect to the sample, a detection arrangement having a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements reflected by the first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by the second local probe. Further, methods for effecting local measurements and local manipulations using multiple local probes are provided.
-
Citations
12 Claims
-
1. A local probe measuring device for effecting local measurements referring to a sample, comprising:
-
a first local probe for local measurements with respect to a sample or a reference surface, a second local probe for local measurements with respect to the sample or the reference surface, a rigid mechanical coupling between the first local probe and the second local probe, a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust a first measurement condition of the first local probe with respect to the sample or the reference surface and a second measurement condition of the second local probe with respect to the sample or the reference surface, a detection arrangement comprising a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements effected by said first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by said second local probe, characterized in that more than two local probes are provided for local measurements with respect to the sample or the reference surface, which are rigidly mechanically coupled with each other and are commonly adjustable by the positioning arrangement. - View Dependent Claims (2, 3, 4)
-
-
5. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:
-
a first local probe adapted to interact locally with a sample or a reference surface, a second local probe adapted to interact locally with the sample or a reference surface, a rigid mechanical coupling between the first local probe and the second local probe, a positioning arrangement adapted to commonly adjust at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first probe with the sample or the reference surface and at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface, a detection arrangement comprising a first detection arrangement associated with the first local probe adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction and a second detection arrangement associated with the second local probe adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first interaction, characterized in that more than two local probes adapted to interact locally with the sample or the reference surface are provided, which are rigidly mechanically coupled with each other and are commonly adjustable by the positioning arrangement. - View Dependent Claims (6, 7, 8)
-
-
9. A local probe measuring device for effecting local measurements referring to a sample, comprising:
-
a first local probe for local measurements with respect to a sample or a reference surface, a second local probe for local measurements with respect to the sample or the reference surface, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first local probe with respect to the sample or the reference surface and a second measurement condition of the second local probe with respect to the sample or the reference surface, a detection arrangement comprising a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements effected by said first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by said second local probe, characterized in that more than two local probes are provided for local measurements with respect to the sample or the reference surface, the measurement conditions of said local probes being commonly adjustable by said measurement condition adjustment arrangement. - View Dependent Claims (10, 11, 12)
-
Specification