Generation of a library of periodic grating diffraction signals
First Claim
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1. A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating, said method comprising:
- obtaining a measured-diffraction signal (measured signal) of the periodic grating;
associating hypothetical parameters with a hypothetical profile;
varying the hypothetical parameters within a range to generate a set of hypothetical profiles;
adjusting the range to vary the hypothetical parameters based on the measured signal; and
generating a set of simulated signals from the set of hypothetical profiles.
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Abstract
A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating includes obtaining a measured-diffraction signal (measured signal). Hypothetical parameters are associated with a hypothetical profile. The hypothetical parameters are varied within a range to generate a set of hypothetical profiles. The range to vary the hypothetical parameters is adjusted based on the measured signal. A set of simulated signals is generated from the set of hypothetical profiles.
231 Citations
65 Claims
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1. A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating, said method comprising:
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obtaining a measured-diffraction signal (measured signal) of the periodic grating;
associating hypothetical parameters with a hypothetical profile;
varying the hypothetical parameters within a range to generate a set of hypothetical profiles;
adjusting the range to vary the hypothetical parameters based on the measured signal; and
generating a set of simulated signals from the set of hypothetical profiles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating, said method comprising:
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obtaining a measured-diffraction signal (measured signal) of the periodic grating;
associating hypothetical parameters with a hypothetical profile;
varying the hypothetical parameters within a range to generate a set of hypothetical profiles;
determining the number of hypothetical parameters to associate with the hypothetical profile based on the measured signal; and
generating a set of simulated signals from the set of hypothetical profiles. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating, said method comprising:
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obtaining a measured-diffraction signal (measured signal) of the periodic grating;
associating hypothetical parameters with a hypothetical profile;
varying the hypothetical parameters within a range to generate a set of hypothetical profiles;
adjusting the range to vary the hypothetical parameters based on the measured signal;
determining the number of hypothetical parameters to associate with the hypothetical profile based on the measured signal; and
generating a set of simulated signals from the set of hypothetical profiles. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. A method of generating a library of simulated-diffraction signals (simulated signals), said method comprising:
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obtaining a measured-diffraction signal (measured signal);
generating a first set of simulated signals, including;
associating a set of hypothetical parameters with a hypothetical profile, varying the hypothetical parameters in the set of hypothetical parameters within a range of values to generate a set of hypothetical profiles, and generating a simulated signal for each hypothetical profile in the set of hypothetical profiles;
adjusting the range to vary the hypothetical parameters based on the measured signal, wherein the range is adjusted prior to generating the first set of simulated signals; and
determining the number of hypothetical parameters to associate with the hypothetical profile based on the measured signal, wherein the number of hypothetical parameters is determined prior to generating the first set of simulated signals. - View Dependent Claims (49, 50, 51, 52, 53)
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54. A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating having a profile shape that can be defined by a set of parameters, said method comprising:
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obtaining a measured-diffraction signal (measured signal) of the periodic grating;
obtaining a range of values for the set of parameters to define the profile shape of the periodic grating;
adjusting the obtained range of values based on the measured signal;
associating a set of hypothetical parameters with a hypothetical profile;
determining the number of hypothetical parameters to associate with the hypothetical profile based on the measured signal;
determining a resolution for the library of simulated signals;
varying the hypothetical parameters of the set of hypothetical parameters at an increment corresponding to the determined resolution within the adjusted range;
generating a set of hypothetical profiles using the determined number of hypothetical parameters and the adjusted range of values;
generating a set of simulated signals based on the set of hypothetical profiles; and
pairing each simulated signal in the set of simulated signals with each hypothetical profile in the set of hypothetical profiles; and
storing said pairings of simulated signals and hypothetical profiles.
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55. A system for generating a library of simulated-diffraction signals (simulated signals) of a periodic grating structure, said system comprising:
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an electromagnetic source configured to illuminate the periodic grating with an incident signal;
a detector configured to obtain a measured-diffraction signal (measured signal) from the incident signal diffracting from the periodic grating; and
a signal processor configured to;
associate hypothetical parameters with a hypothetical profile, determine the number of hypothetical parameters to associate with the hypothetical profile, vary the hypothetical parameters within a range of values to generate a set of hypothetical profiles, adjust the range of values based on the measured signal, and generate a set of simulated signals from the set of hypothetical profiles. - View Dependent Claims (56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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Specification