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Generation of a library of periodic grating diffraction signals

  • US 6,943,900 B2
  • Filed: 07/16/2001
  • Issued: 09/13/2005
  • Est. Priority Date: 09/15/2000
  • Status: Active Grant
First Claim
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1. A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating, said method comprising:

  • obtaining a measured-diffraction signal (measured signal) of the periodic grating;

    associating hypothetical parameters with a hypothetical profile;

    varying the hypothetical parameters within a range to generate a set of hypothetical profiles;

    adjusting the range to vary the hypothetical parameters based on the measured signal; and

    generating a set of simulated signals from the set of hypothetical profiles.

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