Method of producing an integral resonator sensor and case
First Claim
Patent Images
1. A method of producing a sensor comprising the steps of:
- etching a baseplate;
bonding a wafer to the etched baseplate;
through etching the wafer to form a planar mechanical resonator;
through etching the wafer to form a wall of a resonator case; and
bonding an end cap wafer to the wall to complete the resonator case;
wherein the resonator case comprises a vacuum housing.
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Abstract
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
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Citations
51 Claims
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1. A method of producing a sensor comprising the steps of:
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etching a baseplate;
bonding a wafer to the etched baseplate;
through etching the wafer to form a planar mechanical resonator;
through etching the wafer to form a wall of a resonator case; and
bonding an end cap wafer to the wall to complete the resonator case;
wherein the resonator case comprises a vacuum housing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method of producing a sensor comprising the steps of:
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etching a baseplate;
bonding a wafer to the etched baseplate;
through etching the wafer to form a planar mechanical resonator;
through etching the wafer to form a wall of a resonator case; and
bonding an end cap wafer to the wall to complete the resonator case;
wherein control electronics are disposed within the resonator case for exciting and sensing movement of the resonator. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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Specification