Exhaust gas recirculation system using absolute micromachined pressure sense die
First Claim
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1. An absolute pressure sensing system, comprising:
- an absolute pressure sensor composed of a plurality of pressure sense die and a hermetically sealed cover located above said plurality of pressure sense die;
a carrier to which said plurality of pressure sense die are mounted by a cured adhesive, wherein said carrier and said plurality of pressure sense die are attached to a circuit board populated with a plurality of surface mounted components for electrical connection to said absolute pressure sensor; and
an ASIC for digitally calibrating said plurality of pressure sense die with temperature compensation, wherein said ASIC automatically controls a plurality of output modes thereof during calibration.
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Abstract
An absolute pressure sensor is disclosed that includes a plurality of pressure sense die and a hermetically sealed cover located above the plurality of pressure sense die. A carrier can be provided to which the pressure sense die are mounted by a cured adhesive. The carrier and the pressure sense die can be attached to a circuit board populated with a plurality of surface mounted components for electrical connection to the absolute pressure sensor. An ASIC can also be provided for digitally calibrating the pressure sense die with temperature compensation, wherein the ASIC automatically controls a plurality of output modes thereof during calibration.
48 Citations
21 Claims
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1. An absolute pressure sensing system, comprising:
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an absolute pressure sensor composed of a plurality of pressure sense die and a hermetically sealed cover located above said plurality of pressure sense die; a carrier to which said plurality of pressure sense die are mounted by a cured adhesive, wherein said carrier and said plurality of pressure sense die are attached to a circuit board populated with a plurality of surface mounted components for electrical connection to said absolute pressure sensor; and an ASIC for digitally calibrating said plurality of pressure sense die with temperature compensation, wherein said ASIC automatically controls a plurality of output modes thereof during calibration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A sensor system, comprising:
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an absolute pressure sensor comprising a plurality of pressure sense die and a hermetically sealed cover located above said plurality of pressure sense die; a carrier to which said plurality of pressure sense die are mounted by a cured adhesive, wherein said carrier and said plurality of pressure sense die are attached to a circuit board populated with a plurality of surface mounted components for electrical connection to said absolute pressure sensor, wherein said circuit board comprises a board assembly comprising an over-voltage and reverse polarity protection circuit, an EMC protection circuit, and an output protection circuit; a housing in which said absolute pressure sensor is located in association with said carrier and said circuit board populated with said plurality of surface mounted components for electrical connection to said absolute pressure sensor; an ASIC for digitally calibrating said plurality of pressure sense die with temperature compensation, wherein said ASIC automatically controls a plurality of output modes thereof during calibration. - View Dependent Claims (12, 13)
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14. An absolute pressure sensing method, comprising the steps of:
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providing an absolute pressure sensor comprising a plurality of pressure sense die and a hermetically sealed cover located above said plurality of pressure sense die; mounting said plurality of pressure sense die to a carrier by a cured adhesive, wherein said carrier and said plurality of pressures sense die are attached to a circuit board populated with a plurality of surface mounted components for electrical connection to said absolute pressure sensor; and automatically and digitally calibrating said plurality of pressure sense die with temperature compensation utilizing an ASIC that controls a plurality of output modes thereof during calibration. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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Specification