Heated gas distribution plate for a processing chamber

• US 6,946,033 B2
• Filed: 09/16/2002
• Issued: 09/20/2005
• Est. Priority Date: 09/16/2002
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Venkataraman, Shankar, Rocha-Alvarez, Juan Carlos, Shmurun, Inna, Lee, Ju-Hyung, Zhao, Maosheng, Tsuei, Lun, Sen, Soovo, Kim, Troy
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US10/245,443
• Publication Number:
  US 20040050492A1
• Time in Patent Office: 1,100 Days
• Field of Search: 118/715, 118/722, 118/724, 118/728, 118/50, 156/345.29, 156/345.33, 156/345.34, 156/345.35
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence

Abstract

An apparatus for distributing gas in a processing system. In one embodiment, the system includes a gas distribution assembly having a gas distribution plate. The gas distribution plate defines a plurality of holes through which gases are transmitted. The assembly further includes a gas box coupled to the gas distribution plate, in which the gas box is configured to supply the gases into the plurality of holes. The assembly further includes a means for reducing heat transfer from the gas box to the gas distribution plate.

Claims

1. An apparatus for distributing gas in a processing system, comprising:

a gas distribution assembly having;

a gas distribution plate comprising a flange portion disposed around the gas distribution plate and a bottom plate defining a plurality of holes through which gases are transmitted;

a gas box coupled to the gas distribution plate, the gas box being configured to supply the gases into the plurality of holes; and

an electrical heating element disposed inside the bottom plate for heating the bottom plate.

2. The apparatus claim 1, further comprising a radio frequency (RF) gasket disposed between the gas distribution plate and the gas box configured for providing a spacing between the flange portion of the gas distribution plate and the gas box.

3. The apparatus of claim 1, further comprising one or more recesses between the flange portion of the gas distribution plate and the gas box.

4. The apparatus of claim 1, further comprising a thermal isolator disposed between the gas box and the gas distribution plate, the isolator being configured to eliminate contact between the gas box and the flange portion of the gas distribution plate.

5. The apparatus of claim 1, wherein the electrical heating element is configured to heat the gas distribution plate to a temperature of approximately between 200°

and 300°

Celsius.

6. The apparatus of claim 1, wherein the heating element is disposed around the plurality of holes.

7. The apparatus of claim 1, wherein the heating element is insulated with radio frequency (RF) insulating material.

13. The apparatus of claim 4, wherein the isolator is made from a ceramic material.

14. The apparatus at claim 1, wherein the electrical heating element is circumferentially disposed around a perimeter of the bottom plate.

15. The apparatus of claim 6, wherein the electrical heating element is circumferentially disposed around a perimeter of the bottom plate.

8. A gas distribution assembly for a processing system, comprising:

a gas distribution plate comprising a flange portion and a bottom plate defining a plurality of holes through which gases are transmitted;

a gas box coupled to the gas distribution plate through the flange portion, the gas box being configured to supply the gases into the plurality of holes;

an electrical heating element disposed inside the bottom plate for heating the bottom plate; and

a radio frequency (RF) gasket disposed between the flange portion of the gas distribution plate and the gas box forming a spacing therein to reduce the contact area between the gas distribution plate and the gas box, and thereby reducing heat transfer from the gas distribution plate to the gas box.

9. The gas distribution assembly of claim 8, wherein the heating element is disposed within a channel around the plurality of holes.

10. The gas distribution assembly of claim 8, wherein the heating element is disposed around the plurality of holes.

11. The gas distribution assembly of claim 8, wherein the heating element is insulated with a radio frequency (RF) insulating material selected from the group consisting of magnesium oxide, fiber glass and NYLON.

16. The gas distribution assembly of claim 8, further comprising

a thermal isolator disposed between the gas box and the flange portion of the gas distribution plate, wherein the thermal isolator is configured to eliminate contact between the gas box and the flange portion of the gas distribution plate.

17. The gas distribution assembly of claim 16, wherein the thermal isolator is made from a ceramic material.

12. The apparatus of claim wherein 3, the recesses provide a distance between the gas distribution plate and the gas box for complete separation, thereby reducing heat transfer from the gas distribution plate to the gas box.