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Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof

  • US 6,947,651 B2
  • Filed: 05/10/2002
  • Issued: 09/20/2005
  • Est. Priority Date: 05/10/2001
  • Status: Expired due to Fees
First Claim
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1. A waveguide, comprising:

  • a waveguide core made of a first host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, wherein the sacrificial material has a decomposition temperature less than a decomposition temperature of the first host material, wherein the decomposition temperature of the sacrificial material is greater than the cure temperature of the first host material; and

    a cladding layer made of a second host material having a plurality of nano air-gaps, wherein the cladding layer is disposed around the waveguide core.

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