Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof
First Claim
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1. A waveguide, comprising:
- a waveguide core made of a first host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, wherein the sacrificial material has a decomposition temperature less than a decomposition temperature of the first host material, wherein the decomposition temperature of the sacrificial material is greater than the cure temperature of the first host material; and
a cladding layer made of a second host material having a plurality of nano air-gaps, wherein the cladding layer is disposed around the waveguide core.
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Abstract
Waveguides and methods of fabrication thereof are presented. A representative waveguide includes a waveguide core and a cladding layer, where the cladding layer surrounds the waveguide core. The waveguide core and cladding can be made of a host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, and the sacrificial material can be selectively decomposed in both the core and cladding layers to form a plurality of nano air-gaps.
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Citations
13 Claims
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1. A waveguide, comprising:
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a waveguide core made of a first host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, wherein the sacrificial material has a decomposition temperature less than a decomposition temperature of the first host material, wherein the decomposition temperature of the sacrificial material is greater than the cure temperature of the first host material; and
a cladding layer made of a second host material having a plurality of nano air-gaps, wherein the cladding layer is disposed around the waveguide core. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A device, comprising:
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a substrate; and
a waveguide disposed on the substrate, wherein the waveguide includes;
a waveguide core made of a material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, wherein the sacrificial material has a decomposition temperature less than a decomposition temperature of the first host material, wherein the decomposition temperature of the sacrificial material is greater than the cure temperature of the first host material; and
a cladding layer made of the material having a plurality of nano air-gaps. - View Dependent Claims (13)
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Specification