Apparatus and method for flow of process gas in an ultra-clean environment
First Claim
1. Apparatus for etching a simple, said apparatus comprsing:
- (a) a source of etchant gas selected from a noble gas halide and a halogen halide;
(b) an etching chamber in communication with said source of etchant gas;
(c) a recirculation loop passing through said etching chamber;
(d) a valve connecting the source to the recirculation loop such that the etchant gas can be introduced into the recirculation loop when the valve is turned on, and the source can be disconnected from the recirculation loop when the valve is shut off; and
(e) a pump disposed within said recirculation loop for recirculating etchant gas along said recirculation loop so as to recirculate the etchant gas in the recirculation loop while the source is disconnected from the recirculation loops.
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Accused Products
Abstract
Processes for the addition or removal of a layer or region from a workpiece material by contact with a process gas in the manufacture of a microstructure are enhanced by the use of recirculation of the process gas. Recirculation is effected by a pump that has no sliding or abrading parts that contact the process gas, nor any wet (such as oil) seals or purge gas in the pump. Improved processing can be achieved by a process chamber that contains a baffle, a perforated plate, or both, appropriately situated in the chamber to deflect the incoming process gas and distribute it over the workpiece surface. In certain embodiments, a diluent gas is added to the recirculation loop and continuously circulated therein, followed by the bleeding of the process gas (such as an etchant gas) into the recirculation loop. Also, cooling of the process gas, etching chamber and/or sample platen can aid the etching process. The method is particularly useful for adding to or removing material from a sample of microscopic dimensions.
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Citations
104 Claims
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1. Apparatus for etching a simple, said apparatus comprsing:
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(a) a source of etchant gas selected from a noble gas halide and a halogen halide;
(b) an etching chamber in communication with said source of etchant gas;
(c) a recirculation loop passing through said etching chamber;
(d) a valve connecting the source to the recirculation loop such that the etchant gas can be introduced into the recirculation loop when the valve is turned on, and the source can be disconnected from the recirculation loop when the valve is shut off; and
(e) a pump disposed within said recirculation loop for recirculating etchant gas along said recirculation loop so as to recirculate the etchant gas in the recirculation loop while the source is disconnected from the recirculation loops. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 100, 103, 104)
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25. A method for etching a sample, said method comprising:
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(a) placing said sample in an etching chamber disposed within a gas recirculation loop, said etching chamber in communication with a source of etchant gas selected from a noble gas halide and a halogen halide, and said gas recirculation loop having a pump disposed therein;
(b) passing etchant gas from said source of etchant gas into said etching chamber to expose said sample to said etchant gas; and
(c) disconnecting the recirculation loop from the source; and
(d) recirculating said etchant gas through said recirculation loop by way of said pump. - View Dependent Claims (26, 27, 28, 29, 30, 31)
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47. Apparatus for adding or removing a layer of material from a sample by contacting said sample with a process gas, said layer having at least one dimension less than 1 mm, said apparatus comprising:
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(a) a source of said process gas selected from a noble gas halide and a halogen halide;
(b) a fabrication chamber in communication with said source of process gas;
(c) a recirculation loop passing through said fabrication chamber, (d) a valve connecting the source to the recirculation loop such that the etchant gas can be introduced into the recirculation loop when the valve is turned on, and the source is disconnected from the recirculation loop when the valve is shut off; and
(e) a pump disposed within said recirculation loop for recirculating process gas along said recirculation loop so as to recirculate the etchant gas in the recirculation loop when the source is disconnected from the recirculation loop. - View Dependent Claims (48, 49, 50, 51, 52, 53, 54, 55, 56, 57)
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58. Apparatus for exposing a silicon-containing sample to a gas comprising a gaseous fluoride etchant selected from a noble gas fluoride and a halogen fluoride for etching silicon, said apparatus comprising:
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a flow-through etching chamber comprising;
a sample support, entry and exit ports for said gas;
a source chamber comprising a noble gas fluoride or halogen fluoride etchant in solid or liquid form, the source chamber and the etching chamber capable of being in fluid communication with each other;
a recirculation loop and recirculation pump within the loop, the recirculation loop constructed to connect to the etching chamber at two locations to allow etching gas to flow into and out of the etching chamber, and the recirculation pump in communication with the etching chamber and adapted to pump etching gas repeatedly through the etching chamber;
a valve connecting the source to the recirculation loop such that the etchant gas can be introduced into the recirculation loop when the valve is turned on, and the source is disconnected from the recirculation loop when the valve is shut off; and
a pump disposed within said recirculation loop for recirculating etchant gas along said recirculation loop so as to recirculate the etchant gas in the recirculation loop when the source is disconnected from the recirculation loop. - View Dependent Claims (59, 60, 61, 62, 63)
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64. Apparatus for etching silicon from a sample by exposing said sample to a gas comprising a silicon etchant selected from a noble gas halide and a halogen halide, said apparatus comprising:
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a source of etchant gas selected from a noble gas halide and a halogen halide;
a flow-through chamber having;
a sample support, entry and exit ports for said etchant gas, a perforated plate between said entry port and said sample support, and a baffle between said entry port and said perforated plate, said baffle positioned to deflect said etchant gas from said etchant port radially toward the periphery of said perforated plate, and said perforated plate containing an array of perforations arranged to distribute said deflected etchant gas over all exposed surfaces of said sample; and
a reciprocating pump driving said gas toward said entry port, said reciprocating pump comprising;
an enclosed housing comprising bellows-type wall sections and a partition arranged to divide the interior of said housing into first and second chambers, said partition being movable in a reciprocating manner to cause collapse and extensions of said bellows-type wall sections whereby one chamber contracts while the other expands and vice versa;
inlet and outlet ports for each chamber with controllable shutoff valves at each port; and
a partition driver for moving said partition in a reciprocating manner and opening and closing said shutoff valves in a coordinating sequence, causing said chambers to draw fluid in through alternating inlet ports while discharging fluid through alternating outlet ports and thus together to produce a continuous outlet flow. - View Dependent Claims (65, 66, 67)
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68. Apparatus for etching a sample by contacting the sample with a vapor fluoride etchant gas selected from a noble gas fluoride and a halogen fluoride:
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(a) a source of said fluoride etchant gas, said source of etchant gas being comprised of first and second chambers, said first chamber retaining primarily a liquid or solid condensed form of said fluoride etchant gas, and said second chamber retaining said fluoride etchant gas volatilized from said condensed form, said source comprising a temperature regulator for maintaining the first and second chambers at different temperatures;
(b) an etching chamber in communication with said source of fluoride etchant gas for holding the sample to be etched by the fluoride etchant gas;
(c) a recirculation loop passing through said etching chamber;
(d) a valve connecting the source to the recirculation loop such that the etchant gas can be introduced into the recirculation loop when the valve is turned on, and the source if disconnected from the recirculation loop when the valve is shut off; and
(e) a pump disposed within said recirculation loop for recirculating etchant gas along said recirculation loop so as to recirculate the etchant gas in the recirculation loop when the source is disconnected from the recirculation loop. - View Dependent Claims (69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81)
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82. Apparatus for etching a sample comprising a silicon material and a dielectric material, comprising:
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a source of a noble gas halide and/or halogen halide etchant gas;
an etching chamber in communication with the source of the etchant gas;
a surface within the etching chamber for holding the sample to be etched;
a cooling unit for cooling the surface, etching chamber and/or etching gas within the etching chamber below room temperature. - View Dependent Claims (83, 84, 85, 86, 87, 88)
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89. An apparatus for use in etching a sample, comprising:
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a source of an etchant gas selected from a noble gas halide and a halogen halide;
an etching chamber having the sample and in communication with the source; and
a recirculation loop passing through the etching chamber;
a reciprocating pump disposed within said recirculation loop for recirculating the etchant gas along said recirculation loop. - View Dependent Claims (90)
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91. An etching system for etching a sample, comprising:
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first means for containing an etchant gas selected from a noble gas halide and a halogen halide;
second means in communication with the first means for holding the sample and providing an apace in which the sample can be etched with the etchant gas;
a recirculation loop passing through said second means;
third means for connecting the first means to the recirculation loop such that the etchant gas can be introduced into the recirculation loop when said third means is turned on, and the first means is disconnected from the recirculation loop when the third means is shut off; and
fourth means disposed within said recirculation loop for recirculating the etchant gas along said recirculation loop so as to continuously recirculating the etchant gas in the recirculation loop when the first means is disconnected from the recirculation loop. - View Dependent Claims (92, 93)
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94. A method for etching a sample, comprising:
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placing said sample in an etching chamber disposed within a gas recirculation loop, said etching chamber in communication with a source of etchant gas selected from a noble gas halide and a halogen halide, and said gas recirculation loop having a pump disposed therein;
passing etchant gas from said source of etchant gas into said etching chamber to expose said sample to said etchant gas; and
maintaining the etchant gas in the recirculation loop at a temperature so as to keep the etchant gas in vapor form. - View Dependent Claims (95, 96, 97)
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98. An apparatus for use in etching a sample, comprising:
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a source of an etchant gas selected from a noble gas halide and a halogen halide;
an etching chamber having the sample and in communication with the source; and
a recirculation loop passing through the etching chamber;
a bellows pump disposed within said recirculation loop for recirculating the etchant gas along said recirculation loop.
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99. A method for etching a sample, said method comprising:
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(a) placing said sample in an etching chamber disposed within a gas recirculation loop, said etching chamber in communication with a source of etchant gas selected from a noble gas halide and a halogen halide, and said gas recirculation loop having a reciprocating pump disposed therein;
(b) passing etchant gas from said source of etchant gas into said etching chamber to expose said sample to said etchant gas; and
(c) recirculating said etchant gas through said recirculation loop by way of said reciprocating pump.
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101. Apparatus for exposing a silicon-containing sample to a gas comprising a gaseous fluoride etchant selected from a noble gas fluoride and a halogen fluoride for etching silicon, said apparatus comprising:
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a flow-through etching chamber comprising;
a sample support, entry and exit ports for said gas;
a source chamber comprising a noble gas fluoride or halogen fluoride etchant in solid or liquid form, the source chamber and the etching chamber capable of being in fluid communication with each other;
a recirculation loop and reciprocating pump with the loop, the recirculation loop constructed to connect to the etching chamber at two locations to allow etching gas to flow into and out of the etching chamber, and the reciprocating pump in communication with the etching chamber and adapted to pump etching gas repeatedly through the etching chamber.
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102. Apparatus for etching a sample by contacting the sample with a vapor fluoride etchant gas selected from a noble gas fluoride and a halogen fluoride;
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(a) a source of said fluoride etchant gas, said source of etchant gas being comprised of first and second chambers, said first chamber retaining primarily a liquid or solid condensed form of said fluoride etchant gas, and said second chamber retaining said fluoride etchant gas volatilized from said condensed form, said source comprising a temperature regulator for maintaining the first and second chambers at different temperatures;
(b) an etching chamber in communication with said source of fluoride etchant gas for holding the sample to be etched by the fluoride etchant gas; and
(c) a reciprocating pump in connection with the etching chamber and the source so as to recirculate the etchant gas through the etching chamber.
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Specification