Systems and methods for overcoming stiction
First Claim
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1. An electro-mechanical system, the system comprising:
- a base layer;
a structural plate supported above the base layer by a pivot, wherein a first portion of the structural plate contacts the base layer or a stop disposed on the base layer, and a second portion of the structural plate contacts the pivot, and wherein a structure is disposed between the first and the second portions;
a driving force, wherein the driving force has a frequency at or near the natural frequency, or a harmonic thereof, of the structure; and
wherein the driving force causes a vibration of the structural plate relative to the base layer, the vibration sufficient to overcome stiction related forces between the base layer and the structural plate.
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Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
39 Citations
12 Claims
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1. An electro-mechanical system, the system comprising:
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a base layer;
a structural plate supported above the base layer by a pivot, wherein a first portion of the structural plate contacts the base layer or a stop disposed on the base layer, and a second portion of the structural plate contacts the pivot, and wherein a structure is disposed between the first and the second portions;
a driving force, wherein the driving force has a frequency at or near the natural frequency, or a harmonic thereof, of the structure; and
wherein the driving force causes a vibration of the structural plate relative to the base layer, the vibration sufficient to overcome stiction related forces between the base layer and the structural plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification