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Surface acoustic wave actuator and deflector employing the same

  • US 6,949,868 B2
  • Filed: 12/23/2003
  • Issued: 09/27/2005
  • Est. Priority Date: 12/27/2002
  • Status: Active Grant
First Claim
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1. A surface acoustic wave actuator having a mover arranged on a first surface of a piezoelectric board and comb-shaped electrodes formed on the first surface, high frequencies being applied to the comb-shaped electrodes to generate Rayleigh waves that move the mover, comprising:

  • the com-shaped electrodes including first to fourth electrodes formed on the first surface of the piezoelectric board, the first and third comb-shaped electrodes being on each side of the mover on an X-axis, the second and fourth comb-shaped electrodes being on each side of the mover on a Y-axis;

    the mover at least having a permanent magnet diposed so as to generate a magnetic field vertically to said piezoelectric board;

    a unit configured to selectively apply a high frequency to at least one of two electrodes, one selected from the first and third comb-shaped electrodes and the other from the second and fourth comb-shaped electrodes; and

    a mover holder facing the mover with the piezoelectric board interposed therebetween, the mover holder at least having a magnetic material configured to hold the mover and being movable together with the mover.

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