Multiple hinge MEMS device
First Claim
1. A MEMS device comprising:
- a substrate;
a movable micromechanical element movable relative to the substrate;
a hinge held on the substrate and connected to the movable micromechanical element for allowing movement of the micromechanical element, and a connector separate from the hinge for allowing electrical connection to the movable micromechanical element, wherein the hinge is made of a material different than the connector.
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Accused Products
Abstract
A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.
24 Citations
98 Claims
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1. A MEMS device comprising:
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a substrate;
a movable micromechanical element movable relative to the substrate;
a hinge held on the substrate and connected to the movable micromechanical element for allowing movement of the micromechanical element, and a connector separate from the hinge for allowing electrical connection to the movable micromechanical element, wherein the hinge is made of a material different than the connector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A MEMS device comprising:
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a substrate;
a movable micromechanical element held on the substrate such that the micromechanical element is movable relative to the substrate;
a connector and a hinge connecting the movable micromechanical element to the substrate for allowing movement of the micromechanical element, wherein the connector has an electrical conductivity greater than the hinge. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A MEMS device comprising:
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a substrate;
a movable micromechanical element movable relative to the substrate;
a connector and a hinge held on the substrate by a plurality of posts and arranged for allowing movement of the micromechanical element, wherein the connector and hinge have different spring constants;
wherein the connector and hinge extend between the posts across the micromechanical element; and
wherein the connector and hinge are spaced apart from the micromechanical element with a gap formed therebetween. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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66. A MEMS device comprising:
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a substrate;
a movable micromechanical element movable relative to the substrate;
a connector and a hinge held on the substrate by a plurality of posts and arranged for allowing movement of the micromechanical element, wherein the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge;
wherein the connector and hinge extend between the posts across the micromechanical element; and
wherein the connector and hinge are spaced apart from the micromechanical element with a gap formed therebetween. - View Dependent Claims (67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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86. A MEMS device comprising:
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a substrate;
a movable micromechanical element movable relative to the substrate;
a connector and a hinge for allowing movement of the micromechanical element, the hinge being an elongated hinge that connects to one or more posts on the substrate and to the movable micromechanical element, each hinge having a length in the direction of the elongation, and a width and depth; and
wherein at least one of the width and depth of the connector is different than the width or depth of the hinge. - View Dependent Claims (87, 88, 89, 90, 91, 92, 93, 94, 95, 96)
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97. A spatial light modulator comprising:
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a substrate;
a post connected to the substrate;
a movable micromirror element connected to the post via a hinge such that the micromirror element is movable relative to the substrate; and
a connector separate from the hinge, wherein the hinge supplies at least 90% of the restoring force to the micromirror element and the connector supplies 10% or less of the restoring force. - View Dependent Claims (98)
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Specification