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Hinge structures for micro-mirror arrays

  • US 6,952,302 B2
  • Filed: 02/12/2003
  • Issued: 10/04/2005
  • Est. Priority Date: 08/11/2000
  • Status: Expired due to Term
First Claim
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1. A micro-mirror device comprising a micro-mirror plate attached to a hinge for rotating relative to the substrate by the hinge, the hinge comprising:

  • a top metal layer comprising a metal that is an elemental metallic substance or an alloy or a metalloid;

    a bottom metal layer comprising a metal that is an elemental metallic substance or an alloy or a metalloid; and

    an intermediate ceramic layer between the top and bottom metal layers.

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