Variable mirror and information apparatus comprising variable mirror
First Claim
1. A deformable mirror comprising:
- a substrate;
a reflector supported by said substrate and having a plurality of light reflecting areas which can be separately driven; and
a plurality of drive units for independently driving each of said plurality of light reflecting areas and thereby controlling the dispositional relationship between each light reflecting area and said substrate, wherein;
each of said plurality of drive units comprises;
a plurality of electrodes supported by said substrate, a tilt member which is tiltable around the axis of tilt by being attracted by a selected one of said plurality of electrodes, and a coupling member for coupling the tilt member with the reflector at a distance from the axis of tilt.
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Abstract
A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.
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Citations
20 Claims
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1. A deformable mirror comprising:
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a substrate;
a reflector supported by said substrate and having a plurality of light reflecting areas which can be separately driven; and
a plurality of drive units for independently driving each of said plurality of light reflecting areas and thereby controlling the dispositional relationship between each light reflecting area and said substrate, wherein;
each of said plurality of drive units comprises;
a plurality of electrodes supported by said substrate, a tilt member which is tiltable around the axis of tilt by being attracted by a selected one of said plurality of electrodes, and a coupling member for coupling the tilt member with the reflector at a distance from the axis of tilt. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification