Vertical MEMS gyroscope by horizontal driving
First Claim
1. A vertical MEMS gyroscope by horizontal driving, comprising:
- a substrate;
a support layer fixed on an upper surface of a particular area of the substrate;
a driving structure floating above the substrate and having a portion thereof fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate;
a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to an upper surface of the substrate;
a cap wafer positioned above the driving structure and the detecting structure, and bonded with the substrate, the cap wafer defining an interior space above the driving structure; and
a fixed vertical displacement detection electrode formed on an underside of the cap wafer above the detecting surface, for detecting displacement of the detecting structure in the vertical direction.
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Accused Products
Abstract
A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate, a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to the substrate, a cap wafer bonded with the substrate positioned above the driving structure and the detecting structure, and a fixed vertical displacement detection electrode formed at a predetermined location of an underside of the cap wafer, for detecting displacement of the detecting structure in the vertical direction.
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Citations
10 Claims
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1. A vertical MEMS gyroscope by horizontal driving, comprising:
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a substrate;
a support layer fixed on an upper surface of a particular area of the substrate;
a driving structure floating above the substrate and having a portion thereof fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate;
a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to an upper surface of the substrate;
a cap wafer positioned above the driving structure and the detecting structure, and bonded with the substrate, the cap wafer defining an interior space above the driving structure; and
a fixed vertical displacement detection electrode formed on an underside of the cap wafer above the detecting surface, for detecting displacement of the detecting structure in the vertical direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification