×

Vertical MEMS gyroscope by horizontal driving

  • US 6,952,965 B2
  • Filed: 12/24/2003
  • Issued: 10/11/2005
  • Est. Priority Date: 12/24/2002
  • Status: Expired due to Term
First Claim
Patent Images

1. A vertical MEMS gyroscope by horizontal driving, comprising:

  • a substrate;

    a support layer fixed on an upper surface of a particular area of the substrate;

    a driving structure floating above the substrate and having a portion thereof fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a predetermined area capable of vibrating in a predetermined direction parallel to the substrate;

    a detecting structure fixed to the driving structure on a same plane as the driving structure, and having a predetermined area capable of vibrating in a vertical direction with respect to an upper surface of the substrate;

    a cap wafer positioned above the driving structure and the detecting structure, and bonded with the substrate, the cap wafer defining an interior space above the driving structure; and

    a fixed vertical displacement detection electrode formed on an underside of the cap wafer above the detecting surface, for detecting displacement of the detecting structure in the vertical direction.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×