Vibration isolator with low lateral stiffness

• US 6,953,109 B2
• Filed: 10/08/2002
• Issued: 10/11/2005
• Est. Priority Date: 10/08/2002
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Watson, Douglas C., Phillips, Alton H.
• Primary Examiner(s): Siconolfi, Robert A.
• Assistant Examiner(s): SY, MARIANO ONG
• Application Number:
  US10/267,489
• Publication Number:
  US 20040065517A1
• Time in Patent Office: 1,099 Days
• Field of Search: 188/378, 188/379, 188/380, 267/136, 267/195, 267/64.27, 267/64.28, 248/631, 248/622, 248/636, 355/53
• US Class Current: 188/378
• CPC Class Codes: F16F 15/0232 with at least one gas spring F16F15/027 takes precedence
• CPC Class Codes: F16F 9/02 using gas only or vacuum F16F9/006 takes precedence

Abstract

A vibration isolator (200) for isolating a first assembly (202) from vibration from a second assembly (204) includes a housing (206) that is secured to the second assembly (204) and a pendulum assembly (208). The pendulum assembly (208) includes one or more pistons (226) and a connector assembly (224). The piston (226) is coupled to the first assembly (202). The connector assembly (224) couples the piston (226) to the housing (206) and allows the piston (226) to swing laterally relative to the housing (206). The vibration isolator (200) can also include a pendulum support (264) and/or a mover (580) that moves the piston (226) and assists in supporting the load of the first assembly (202).

Claims

1. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a sleeve positioned within the housing;

a connector assembly that flexibly connects the sleeve to the housing and allows the sleeve to move relative to the housing substantially transverse to the first axis;

a first piston that is coupled to the first assembly;

a first piston seal that seals the first piston to the sleeve; and

a pendulum support including a resilient member that flexibly connects the sleeve to the first piston.

2. The vibration isolator of claim 1 wherein the pendulum support includes a support beam that extends across the sleeve and the resilient member flexibly connects the support beam to the first piston.

3. The vibration isolator of claim 1 wherein during lateral movement of the first assembly, the first piston moves laterally relative to the first axis along a substantially arc shaped path.

4. The vibration isolator of claim 1 further comprising a fluid source that adjusts the pressure of a first fluid that acts upon the first piston to move the first piston along the first axis.

5. The vibration isolator of claim 1 wherein the connector assembly includes a connector center point located along the first axis and the first piston swings relative to the housing about a movement axis that is located near the connector center point.

6. The vibration isolator of claim 5 wherein the movement axis is positioned between the first assembly and the second assembly.

7. The vibration isolator of claim 5 wherein the connector assembly includes a connector area of motion that is annular shaped and the movement axis is positioned at approximately the center of the connector area of motion.

8. The vibration isolator of claim 7 wherein the first piston seal includes a seal area of motion that is annular shaped, wherein the connector area of motion has a diameter that is approximately equal to a diameter of the seal area of motion.

9. The vibration isolator of claim 8 wherein the connector area of motion is substantially coaxial with the seal area of motion.

19. An isolation system including the vibration isolator of claim 1.

20. An exposure apparatus including the isolation system of claim 19.

21. A device manufactured with the exposure apparatus according to claim 20.

22. A wafer on which an image has been formed by the exposure apparatus of claim 20.

10. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a sleeve positioned within the housing;

a connector assembly that flexibly connects the sleeve to the housing and allows the sleeve to move relative to the housing substantially transverse to the first axis;

a first piston that is coupled to the first assembly;

a first piston seal that seals the first piston to the sleeve;

a pendulum support that flexibly connects the sleeve to the first piston; and

a second piston that is coupled to the first piston, wherein the pistons move concurrently laterally relative to the first axis.

11. The vibration isolator of claim 10 wherein the pistons move concurrently along the first axis.

12. The vibration isolator of claim 10 further comprising a fluid source that controls the pressure that acts on each piston.

13. The vibration isolator of claim 10 wherein the connector assembly includes a first connector and a second connector, each connector being centered about a central point that is located along the first axis and wherein the pistons pivot relative to the housing about a movement axis that is located along the first axis between the central points of the connectors.

14. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a sleeve positioned within the housing;

a connector assembly that flexibly connects the sleeve to the housing and allows the sleeve to move relative to the housing substantially transverse to the first axis;

a first piston that is coupled to the first assembly;

a first piston seal that seals the first piston to the sleeve;

a pendulum support that flexibly connects the sleeve to the first piston; and

a mover that moves the first piston relative to the housing.

15. The vibration isolator of claim 14 wherein the mover includes a first mover component coupled to the first piston, and a second mover component coupled to the housing.

16. The vibration isolator of claim 15 wherein the first mover component moves concurrently with the first piston laterally relative to the first axis and along the first axis.

17. The vibration isolator of claim 15 wherein one of the mover components includes a magnet and the other mover component includes a conductor.

18. The vibration isolator of claim 15 wherein the pendulum assembly includes a piston shaft that couples the first piston to the first assembly, and wherein the first mover component is secured to the piston shaft.

23. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a pendulum assembly coupled to the housing, the pendulum assembly including a first piston and a second piston that are coupled to the first assembly and a connector assembly that allows the pistons to move concurrently laterally relative to the first axis; and

a fluid source that adjusts the pressure of a first fluid that acts upon the first piston and a second fluid that acts upon the second piston.

24. The vibration isolator of claim 23 wherein the pistons move concurrently along the first axis.

25. The vibration isolator of claim 23 wherein the fluid source controls the pressure below each piston.

26. The vibration isolator of claim 23 wherein the connector assembly includes a first connector and a second connector, each connector being centered about a central point that is located along the first axis and wherein the pistons pivot relative to the housing about a movement axis that is located along the first axis between the central points of the connectors.

27. The vibration isolator of claim 23 wherein the pendulum assembly further comprises a sleeve positioned within the housing, and a seal assembly that seals the pistons to the sleeve, and wherein the connector assembly flexibly connects the sleeve to the housing and allows the sleeve to move relative to the housing substantially transverse to the first axis.

28. The vibration isolator of claim 27 further comprising a pendulum support that flexibly connects the sleeve to the pistons.

29. The vibration isolator of claim 28 wherein the pendulum support includes a support beam that extends across the sleeve and a resilient member that flexibly connects the support beam to at least one of the pistons.

30. The vibration isolator of claim 23 wherein the pendulum assembly further comprises a third piston that is coupled to the first piston and the second piston, and wherein the connector assembly allows the first piston, the second piston and the third piston to swing concurrently laterally relative to the first axis.

31. The vibration isolator of claim 23 wherein the first fluid and the second fluid are at the same pressure.

32. An isolation system including the vibration isolator of claim 23.

33. An exposure apparatus including the isolation system of claim 32.

34. A device manufactured with the exposure apparatus according to claim 33.

35. A wafer on which an image has been formed by the exposure apparatus of claim 33.

36. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a pendulum assembly coupled to the housing, the pendulum assembly including a first piston that is coupled to the first assembly and a connector assembly that allows the first piston to swing substantially laterally relative to the first axis, the first piston including a first side and a second side;

a mover that is coupled to the first piston, the mover moving the first piston relative to the housing along the first axis; and

a fluid source that adjusts the pressure of a fluid that acts upon the first side of the first piston without acting on the second side to move the piston along the first axis.

41. The vibration isolator of claim 36 wherein the connector assembly includes a connector center point located along the first axis and the first piston swings relative to the housing about a movement axis that is located near the connector center point.

42. The vibration isolator of claim 36 further comprising a second piston that is coupled to the first piston, wherein the pistons move concurrently laterally relative to the first axis, and the pistons move concurrently along the first axis.

45. An isolation system including the vibration isolator of claim 36.

46. An exposure apparatus including the isolation system of claim 45.

47. A device manufactured with the exposure apparatus according to claim 46.

48. A wafer on which an image has been formed by the exposure apparatus of claim 46.

37. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a pendulum assembly coupled to the housing, the pendulum assembly including a first piston that is coupled to the first assembly and a connector assembly that allows the first piston to swing substantially laterally relative to the first axis;

a mover that is coupled to the first piston, the mover moving the first piston relative to the housing along the first axis, wherein the mover includes a first mover component coupled to the first piston, and a second mover component coupled to the housing; and

a fluid source that adjusts the pressure of a fluid that acts upon the first piston to move the piston along the first axis.

38. The vibration isolator of claim 37 wherein the first mover component moves concurrently with the first piston laterally relative to the first axis and along the first axis.

39. The vibration isolator of claim 37 wherein one of the mover components includes a magnet and the other mover component includes a conductor.

40. The vibration isolator of claim 37 wherein the pendulum assembly includes a piston shaft that couples the first piston to the first assembly, and wherein the first mover component is secured to the piston shaft.

43. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a pendulum assembly coupled to the housing, the pendulum assembly including a first piston that is coupled to the first assembly and a connector assembly that allows the first piston to swing substantially laterally relative to the first axis, wherein the pendulum assembly further comprises a sleeve positioned within the housing, and a seal assembly that seals the first piston to the sleeve, and wherein the connector assembly flexibly connects the sleeve to the housing and allows the sleeve to move relative to the housing substantially transverse to the first axis;

a mover that is coupled to the first piston, the mover moving the first piston relative to the housing along the first axis; and

a fluid source that adjusts the pressure of a fluid that acts upon the first piston to move the piston along the first axis.

44. The vibration isolator of claim 43 further comprising a pendulum support that flexibly connects the sleeve to the first piston.

49. A vibration isolator that at least partly isolates a first assembly from vibration from a second assembly along a first axis, the vibration isolator comprising:

a housing that is secured to the second assembly;

a pendulum assembly including a shaft that is secured to the first assembly and a connector assembly that connects the shaft to the housing and allows the shaft to swing substantially laterally relative to the first axis; and

a mover including a first mover component secured to the shaft and a second mover component that is secured to the housing.

50. The vibration isolator of claim 49 wherein the pendulum assembly includes a piston that is secured to the shaft.

51. The vibration isolator of claim 50 wherein the piston moves concurrently with the first mover component laterally relatively to the first axis and along the first axis.

52. The vibration isolator of claim 51 further comprising a fluid source that adjusts the pressure of a fluid that acts upon the piston to move the piston along the first axis.

53. The vibration isolator of claim 49 wherein one of the mover components includes a magnet and the other mover component includes a conductor.

54. The vibration isolator of claim 49 wherein the connector assembly includes a connector center point located along the first axis and the first mover component swings relative to the housing about a movement axis that is located near the connector center point.

55. The vibration isolator of claim 54 wherein the movement axis is positioned along the first axis between a central point of the first assembly and a central point of the second assembly.

56. An isolation system including the vibration isolator of claim 49.

57. An exposure apparatus including the isolation system of claim 56.

58. A device manufactured with the exposure apparatus according to claim 57.

59. A wafer on which an image has been formed by the exposure apparatus of claim 57.

60. A method for making a vibration isolator for isolating a first assembly from vibration from a second assembly along a first axis, the method comprising the steps of:

providing a housing that is secured to the second assembly;

positioning a sleeve within the housing;

flexibly connecting the sleeve to the housing with a connector assembly that allows the sleeve to move relative to the housing substantially transverse to the first axis;

coupling a first piston to the first assembly;

sealing the first piston to the sleeve with a first seal; and

flexibly connecting the sleeve to the first piston with a resilient member of a pendulum support.

61. The method of claim 60 wherein the step of flexibly connecting includes the step of providing a support beam that extends across the sleeve and the resilient member flexibly connects the support beam to the first piston.

62. The method of claim 60 wherein during lateral movement of the first assembly, the first piston moves laterally relative to the first axis along a substantially arc shaped path.

63. The method of claim 60 further comprising the step of adjusting the pressure of a first fluid that acts upon the first piston to move the first piston along the first axis.

65. The method of claim 60 further comprising the step of moving the first piston relative to the housing with a mover.

68. A method for making an isolation system including the step of providing a vibration isolator made in accordance with claim 60.

69. A method for providing an exposure apparatus including the step of providing a first assembly, providing a second assembly, and securing the first assembly to the second assembly with a vibration isolator made by the method of claim 60.

70. A method of making a wafer utilizing the exposure apparatus made by the method of claim 69.

71. A method of making a device including at least an exposure process, wherein the exposure process utilizes the exposure apparatus made by the method of claim 69.

64. A method for making a vibration isolator for isolating a first assembly from vibration from a second assembly along a first axis, the method comprising the steps of:

providing a housing that is secured to the second assembly;

positioning a sleeve within the housing;

flexibly connecting the sleeve to the housing with a connector assembly that allows the sleeve to move relative to the housing substantially transverse to the first axis;

coupling a first piston to the first assembly;

sealing the first piston to the sleeve with a first seal;

flexibly connecting the sleeve to the first piston with a pendulum support; and

coupling a second piston to the first piston, wherein the pistons move concurrently laterally relative to the first axis and wherein the pistons move concurrently along the first axis.

66. A method for making a vibration isolator for isolating a first assembly from vibration from a second assembly along a first axis, the method comprising the steps of:

providing a housing that is secured to the second assembly;

positioning a sleeve within the housing;

flexibly connecting the sleeve to the housing with a connector assembly that allows the sleeve to move relative to the housing substantially transverse to the first axis;

coupling a first piston to the first assembly;

sealing the first piston to the sleeve with a first seal;

flexibly connecting the sleeve to the first piston with a pendulum support; and

moving the first piston relative to the housing with a mover, wherein the step of moving includes the step of coupling a first mover component to the first piston, and coupling a second mover component to the housing.

67. The method of claim 66 wherein the first mover component moves concurrently with the first piston laterally relative to the first axis and along the first axis.

72. A method for making a vibration isolator for isolating a first assembly from vibration from a second assembly along a first axis, the method comprising the steps of:

providing a housing that is secured to the second assembly;

coupling a first piston and a second piston to the first assembly;

connecting the pistons to the housing with a connector assembly that allows the pistons to move concurrently laterally relative to the first axis; and

adjusting the pressure of a first fluid that acts upon the first piston and a second fluid that acts upon the second piston with a fluid source to move the pistons concurrently along the first axis.

73. The method of claim 72 wherein during lateral movement of the first assembly, the pistons move concurrently along a substantially arc shaped path.

74. The method of claim 72 further comprising the step of moving the pistons relative to the housing with a mover.

75. The method of claim 74 wherein the step of moving includes the step of coupling a first mover component to the pistons, and coupling a second mover component to the housing.

76. The method of claim 75 wherein the first mover component moves concurrently with the pistons laterally to the first axis and along the first axis.

77. A method for making an isolation system including the step of providing a vibration isolator made in accordance with claim 72.

78. A method for providing an exposure apparatus including the step of providing a first assembly, providing a second assembly, and securing the first assembly to the second assembly with a vibration isolator made by the method of claim 72.

79. A method of making a wafer utilizing the exposure apparatus made by the method of claim 78.

80. A method of making a device including at least an exposure process, wherein the exposure process utilizes the exposure apparatus made by the method of claim 78.

81. A method for making a vibration isolator for isolating a first assembly from vibration from a second assembly along a first axis, the method comprising the steps of:

providing a housing that is secured to the second assembly;

securing a shaft to the first assembly;

flexibly connecting the shaft to the housing with a connector assembly that allows the shaft to swing substantially laterally relative to the first axis; and

providing a mover having a first mover component secured to the shaft and a second mover component that is secured to the housing, the mover components interacting to move the shaft relative to the housing along the first axis.

82. The method of claim 81 further comprising the step of coupling a piston to the piston shaft, wherein during lateral movement of the first assembly, the first piston and the first mover component move concurrently laterally relative to the first axis.

83. The method of claim 81 wherein one of the mover components includes a magnet and the other mover component includes a conductor.

84. A method for making an isolation system including the step of providing a vibration isolator made in accordance with claim 81.

85. A method for providing an exposure apparatus including the step of providing a first assembly, providing a second assembly, and securing the first assembly to the second assembly with a vibration isolator made by the method of claim 81.

86. A method of making a wafer utilizing the exposure apparatus made by the method of claim 85.

87. A method of making a device including at least an exposure process, wherein the exposure process utilizes the exposure apparatus made by the method of claim 85.