Photosensitive composition for photoresist manufacture

• US 6,953,649 B2
• Filed: 06/01/2001
• Issued: 10/11/2005
• Est. Priority Date: 06/05/2000
• Status: Expired due to Fees

• Current Assignee: Rhodia Chimie (Solvac SA)
• Original Assignee: Rhodia Chimie (Solvac SA)
• Inventors: Destarac, Mathias, Prat, Evelyne
• Primary Examiner(s): CHU, JOHN S Y
• Application Number:
  US10/312,638
• Publication Number:
  US 20030165769A1
• Time in Patent Office: 1,593 Days
• Field of Search: 430/157, 430/176, 430/270.1, 430/905, 525/212, 525/291
• US Class Current: 430/176
• CPC Class Codes: C08F 2438/03 Use of a di- or tri-thiocarbonylthio compound, e.g. di- or tri-thioester, di- or tri-thiocarbamate, or a xanthate as chain transfer agent, e.g . Reversible Addition Fragmentation chain Transfer [RAFT] or Macromolecular Design via Interchange of Xanthates [MADIX]
• CPC Class Codes: C08F 293/005 using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent
• CPC Class Codes: G03F 7/0392 the macromolecular compound being present in a chemically amplified positive photoresist composition
• CPC Class Codes: Y10S 430/106 Binder containing

Abstract

The invention concerns a novel photosensitive composition for photoresist and a system comprising a substrate and a photoresist obtained from said novel composition. The photosensitive composition for photoresist comprises a copolymer with hydrophobic blocks whereof at least one block is an hydrophobic block capable of generating a hydrophilic block and comprising at its end a group selected among dithioesters, thioesters-thiones, dithiocarbamates and xanthates, and a photoactive compound capable of generating under the effect of a radiation an active species reacting with the hydrophobic block to generate the hydrophilic block.

Claims

1. A photosensitive composition for photoresists, comprising a copolymer with hydrophobic blocks, at least one block of which is a hydrophobic block capable of generating a hydrophilic block, which comprises, at its end, a group selected from the group consisting of dithioesters, thioethers-thiones, dithiocarbamates and xanthates, and a photoactive compound capable of generating, under the effect of radiation, an active species which reacts with the hydrophobic block to generate said hydrophilic block.

2. The composition according to claim 1, wherein the hydrophobic block comprises side groups which, under the action of the active species, are released, generating the hydrophilic block.

3. The composition according to claim 1, wherein the block copolymer is a diblock copolymer, both blocks of which are hydrophobic blocks capable of generating hydrophilic blocks.

4. The composition according to claim 1, wherein the hydrophobic block capable of generating a hydrophilic block under the effect of the active species can be obtained from at least one ethylenically unsaturated monomer selected from the group consisting of (meth)acrylic esters and alkoxystyrenes.

5. The composition according to claim 1, wherein the block copolymer further comprises a hydrophobic block which does not generate a hydrophilic block under the action of the active species.

6. The composition according to claim 1, wherein the block copolymer exhibits a polydispersity index of less than 2.

7. The composition according to claim 1, wherein the photoactive compound is an acid generator.

8. The composition according to claim 7, wherein the acid generator is selected from the group consisting of diazonium salts, perhalomethylated triazines, diaryliodonium salts, triarylsulphonium salts, triarylselenonium salts and nitrobenzyl esters.

9. The composition according to claim 7, wherein the acid generator is an ionic fluorinated sulphonylimide compound or an ionic fluorinated sulphonylmethylide compound, the associated cation of which is composed of biaryliodonium, arylsulphonium, arylacylsulphonium or diazonium groups.

10. The composition according to claim 1, further comprising an organic solvent which makes it possible to form a homogeneous composition.

11. The composition according to claim 1, wherein the block copolymer is present in an amount of between 10 and 40% by weight of the composition.

12. The composition according to claim 1, wherein the block copolymer corresponds to the following formula:

(R¹¹)_x—

Z¹¹—

C(═

S)—

Z¹²—

[A]—

R¹² 

 

(I)

wherein;

Z¹¹ represents C, N, O, S or P,

Z¹² represents S,

R¹¹ and R¹², which are identical or different, represent;

(i) an optionally substituted alkyl, acyl, aryl, alkene or alkyne group, or

(ii) a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic, or

(iii) an optionally substituted, saturated or unsaturated heterocycle,

it being possible for these groups and rings (i), (ii) and (iii) to be substituted by substituted phenyl groups, substituted aromatic groups or the following groups;

alkoxycarbonyl, aryloxycarbonyl(—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl, such as alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

R representing an alkyl or aryl group,

x corresponds to the valency of Z¹¹ or else

x has a value 0 and, in this case, Z¹¹ represents a phenyl, alkene or alkyne radical optionally substituted by an optionally substituted alkyl, acyl, aryl, alkene or alkyne group;

a carbonaceous ring which is optionally substituted and which is saturated, unsaturated or aromatic;

a heterocycle which is optionally substituted and which is saturated or unsaturated;

alkoxycarbonyl, aryloxycarbonyl (—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl or S-aryl groups;

alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP), or quaternary ammonium salts; and

A represents a polymer chain comprising the hydrophobic block capable of generating a hydrophilic block.

13. The composition according to claim 1, wherein the block copolymer corresponds to the following formulae:

wherein;

X represents an atom chosen from N, C, P or Si,

R²² represents;

(i) an optionally substituted alkyl, acyl, aryl, alkene or alkyne group, or

(ii) a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic, or

(iii) a heterocycle which is saturated or unsaturated and which is optionally substituted or aromatic,

it being possible for these groups and rings (i), (ii) and (iii) to be substituted by substituted phenyl groups, substituted aromatic groups or the following groups;

alkoxycarbonyl, aryloxycarbonyl(—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl, organosilyl or alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

R representing an alkyl or aryl group,

Z, R_21i and R²³, which are identical or different, are chosen from;

a hydrogen atom,

an optionally substituted alkyl, acyl, aryl, alkene or alkyne group,

a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic,

an optionally substituted, saturated or unsaturated heterocycle, alkoxycarbonyl, aryloxycarbonyl (—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl or organosilyl groups, R representing an alkyl or aryl group, alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

n>

0,

i varies from 1 to n,

p is equal to 0, 1 or 2, depending upon the valency of X, furthermore,

if X=C, then Z is not an S-alkyl or S-aryl group, the R¹ⁱ group, with i=n, is not an S-alkyl or S-aryl group,

A represents a polymer chain comprising the hydrophobic block capable of generating a hydrophilic block.

14. The composition according to claim 1, wherein the block copolymer corresponds to the following formula:

wherein;

X represents an atom chosen from N, C, P or Si,

R³² represents;

(i) an optionally substituted alkyl, acyl, aryl, alkene or alkyne group, or

(ii) a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic, or

(iii) a heterocycle which is saturated or unsaturated and which is optionally substituted or aromatic,

it being possible for these groups and rings (i), (ii) and (iii) to be substituted by substituted phenyl groups, substituted aromatic groups or the following groups;

alkoxycarbonyl, aryloxycarbonyl(—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl, organosilyl or alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

R representing an alkyl or aryl group,

Z is;

a hydrogen atom,

an optionally substituted alkyl, acyl, aryl, alkene or alkyne group,

a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic,

an optionally substituted, saturated or unsaturated heterocycle, alkoxycarbonyl, aryloxycarbonyl (—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl or organosilyl groups, R representing an alkyl or aryl group,

groups exhibiting a hydrophilic or ionic nature, such as alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or cationic substituents (quaternary ammonium salts),

R³¹, which are identical or different, are chosen from;

a hydrogen atom,

an optionally substituted alkyl, acyl, aryl, alkene or alkyne group,

a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic,

an optionally substituted, saturated or unsaturated heterocycle, alkoxycarbonyl, aryloxycarbonyl (—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl or organosilyl groups, R representing an alkyl or aryl group,

alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

SR³² groups,

n>

0, and

A represents a polymer chain comprising the hydrophobic block capable of generating the hydrophilic block.

15. The composition according to claim 1, wherein the block copolymer corresponds to the following formula:

S═

C(Z)—

[C≡

C]_n—

S—

[A]—

R⁴¹ 

 

(IV)

wherein;

R⁴¹ represents;

(i) an optionally substituted alkyl, acyl, aryl, alkene or alkyne group, or

(ii) a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic, or

(iii) a heterocycle which is saturated or unsaturated and which is optionally substituted or aromatic,

it being possible for these groups and rings (i), (ii) and (iii) to be substituted by substituted phenyl groups, substituted aromatic groups or the following groups;

alkoxycarbonyl, aryloxycarbonyl (—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl, organosilyl or alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

R representing an alkyl or aryl group,

Z, which are identical or different, are;

a hydrogen atom,

an optionally substituted alkyl, acyl, aryl, alkene or alkyne group,

a carbonaceous ring which is saturated or unsaturated and which is optionally substituted or aromatic,

an optionally substituted, saturated or unsaturated heterocycle, alkoxycarbonyl, aryloxycarbonyl (—

COOR), carboxyl (—

COOH), acyloxy (—

O₂CR), carbamoyl (—

CONR₂), cyano (—

CN), alkylcarbonyl, alkylarylcarbonyl, arylcarbonyl, arylalkylcarbonyl, phthalimido, maleimido, succinimido, amidino, guanidino, hydroxyl (—

OH), amino (—

NR₂), halogen, allyl, epoxy, alkoxy (—

OR), S-alkyl, S-aryl or organosilyl groups, R representing an alkyl or aryl group,

alkaline salts of carboxylic acids, alkaline salts of sulphonic acids, poly(alkylene oxide) chains (POE, POP) or quaternary ammonium salts,

n>

0, and

A represents a polymer chain comprising the hydrophobic block capable of generating a hydrophilic block.

16. The composition according to claim 1, wherein the block copolymer corresponds to the following formula:

S═

C(OR⁵¹)—

S—

[A]—

R⁵² 

 

(V)

wherein;

R⁵¹ represents;

 

wherein;

R⁵³ and R⁵⁴, which are identical or different, are selected from the group consisting of halogen, ═

O, ═

S, —

NO₂, —

SO₃R, NCO, CN, OR, —

SR, —

NR₂, —

COOR, O₂CR, —

CONR₂ or —

NCOR₂ groups with R representing a hydrogen atom or an alkyl, alkenyl, alkynyl, cycloalkenyl, cycloalkynyl, aryl, optionally condensed with an aromatic or nonaromatic heterocycle, alkylaryl, aralkyl or heteroaryl radical;

these radicals can optionally be substituted by one or more identical or different groups chosen from halogens, ═

O, ═

S, OH, alkoxy, SH, thioalkoxy, NH₂, mono- or dialkylamino, CN, COOH, ester, amide or CF₃ or optionally interrupted by one or more atoms chosen from O, S, N or P;

or from a heterocyclic group optionally substituted by one or more groups as defined above;

or R⁵³ and R⁵⁴ form, together with the carbon atom to which they are attached, a hydrocarbonaceous ring or a heterocycle;

R⁵⁵ and R⁵⁶, which are identical or different, represent a group as defined above for R or together form a C₂-C₄ hydrocarbonaceous chain optionally interrupted by a heteroatom chosen from O, S and N;

R⁵² has the same definition as that given for R⁵³; and

A represents a polymer chain comprising the hydrophobic block capable of generating a hydrophilic block.

17. A system comprising a substrate and a film capable of being obtained from the composition as defined in claim 1.